WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM
SAMPLE HOLD DOWN
INDEPENDENT CONTROLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
CLOSED-LOOP HIGH PRECISION 3-PHASE LINEAR MOTOR PID CONTROL
XY TRAVEL OF THE CHUCK
152.4MM X 152.4MM 6" X 6"
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
0.5 μm
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
CHUCK Z MOTION
PROGRAMABLE
CHUCK Z TRAVEL
12.5MM (0.5 in)
CHUCK Z RESOLUTION
0.25 μm
CHUCK Z REPEATABILITY
± 1.0 μm
CHUCK Z STAGE DRIVE
CLOSED-LOOP MICRO STEPPER MOTOR
CHUCK THETA MOTION
PROGRAMABLE
THETA SETTING RANGE
± 7.5° (15°)
THETA RESOLUTION
0.000035°
THETA ACCURACY
< 1.0ΜM (MEASURED AT THE EDGE OF THE CHUCK)
THETA REPEATABILITY
< 1.5 μm"
THETA STAGE DRIVE
HIGH RESOLUTION STEPPER MOTOR, ROTARY ENCODER FEEDBACK SYSTEM
CHUCK ROLL OUT STAGE
YES PRESENTATION 285MM
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
PLATEN Z ADJUSTMENT
38MM WITH LOCK
PLATEN CONTACT SEPERATE
10MM
PLATEN CONTACT REPEATABILITY
±1 MICRON
OPTICAL STAGE DRIVE
MANUAL-COARSE-FINE KNOBS
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z TRAVEL
101MM PNEUMATIC LIFT
CALIBRATION CHUCK
OPTIONAL
THERMAL CAPABILITY
YES (AMBIENT to +200°C)
OPTION
PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA AND MORE