Dedicated to improving Process Performance.
Designed to test pressure sensors, mass flow controllers, pump performance, and chamber integrity.
CAT is used primarily for:
User Friendly Features
Windows Software Interface
The control software operates under Windows 95 (or Windows98). Cue cards and help screens navigate operators through the test procedures making testing a simple operation. A great deal of flexibility allows engineers to design the full array of test or focus on one area of concern.
The CAT software features four levels of security. Operators may run all of the configured test. Service security level users may run tests and view configurations to assure the CAT is working properly. Engineer level users may define the test specifications for each process tool and components. Finally, the owner has full access to all controls including defining the security levels of the other users.
The status view displays the active system with the components presently under test. Graphic representations of gas flows and valves opening provide a birds eye view of the overall configuration. Setting up configurations for multiple process chambers is made simple by the pre-loaded defaults and copy configuration features. Each CAT system comes pre-loaded with factory specifications for most MFCs and manometer types. Selecting the model number automatically loads the default settings. Also, once a process system's configuration is completed, copying the configuration for like process systems is just a couple of mouse clicks away.
The CAT has four swivel wheels t assure easy movement into corners and narrow race ways. The small foot print of 20" by 24" adds to maneuverability. A utility drawer provides a great place for storing cables, adapters and spare components. A retractable power cord and flexcoil reference connections prevent unwanted cables dragging behind when moving from process. Stainless steel skins ensure class 1 clean room compliance.
Pressure Sensor (specified for 10 Torr Reference)
Chamber Leak Rate
Mass Flow Controller