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    CM-460
    CHECKMATE 150MM SEMI-AUTOMATIC PROBE STATION
    DescriptionDocumentsTechnical SpecificationsRelated Products
    CM-460 -RP
    Part Number
    CM-460
    Title
    CHECKMATE 150MM SEMI-AUTOMATIC PROBE STATION
    Applications
    Automated Probing
    Low Current Analysis
    Probe Stations
    Description

    THE CM-460 SERIES PROBE STATIONS OFFER A LARGE VARIETY OF USES AND APPLICATIONS. IT IS BEST USED FOR HIGH SPEED, PRECISE PROBING FOR 150MM OR SMALLER DEVICES, AT AMBIENT TEMPERATURES. WITH ITS LINEAR STAGE THE CM-460 CAN STEP IN X-Y-Z IN A FRACTION OF A SECOND ALLOWING THE PROBES TO TOUCH DOWN ON 100+ TEST SITES IN A MINUTE. DRIVEN BY SIGNATONE'S PROBEMASTER SOFTWARE, MANAGING TESTS, STEP-AND-REPEAT PROGRAMMING AND WAFER MAPPING HAVE NEVER BEEN EASIER.

    Technical Specifications
    WAFER SAMPLE SIZE
    25MM 75MM 100MM 150MM
    SAMPLE HOLD DOWN
    INDEPENDENT CONTROLED VACUUM-ZONES
    CHUCK-STAGE MOVEMENT
    CLOSED-LOOP HIGH PRECISION 3-PHASE LINEAR MOTOR PID CONTROL
    XY TRAVEL OF THE CHUCK
    152.4MM X 152.4MM 6" X 6"
    CHUCK MATERIAL
    NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
    RESOLUTION STANDARD
    0.5 μm
    ACCURACY
    ±2.0 μm
    CHUCK PLANARITY
    LESS-THAN 10 MICRONS
    CHUCK PLANARITY ADJUSTMENT
    YES
    CHUCK Z MOTION
    PROGRAMABLE
    CHUCK Z TRAVEL
    12.5MM (0.5 in)
    CHUCK Z RESOLUTION
    0.25 μm
    CHUCK Z ACCURACY
    ± 2.0 μm
    CHUCK Z REPEATABILITY
    ± 1.0 μm
    CHUCK Z STAGE DRIVE
    CLOSED-LOOP MICRO STEPPER MOTOR
    CHUCK THETA MOTION
    PROGRAMABLE
    THETA SETTING RANGE
    ± 7.5° (15°)
    THETA RESOLUTION
    0.000035°
    THETA ACCURACY
    < 1.0ΜM (MEASURED AT THE EDGE OF THE CHUCK)
    THETA REPEATABILITY
    < 1.5 μm"
    THETA STAGE DRIVE
    HIGH RESOLUTION STEPPER MOTOR, ROTARY ENCODER FEEDBACK SYSTEM
    CHUCK ROLL OUT STAGE
    YES PRESENTATION 285MM
    PLATEN MATERIAL
    STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
    PLATEN Z ADJUSTMENT
    38MM WITH LOCK
    PLATEN CONTACT SEPERATE
    10MM
    PLATEN CONTACT REPEATABILITY
    ±1 MICRON
    OPTICAL STAGE DRIVE
    MANUAL-COARSE-FINE KNOBS
    OPTICAL BRIDGE XY TRAVEL
    50MM X 50MM
    OPTICAL BRIDGE Z TRAVEL
    101MM PNEUMATIC LIFT
    CALIBRATION CHUCK
    OPTIONAL
    THERMAL CAPABILITY
    YES (AMBIENT to +200°C)
    OPTION
    PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA AND MORE