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    CM-250
    CHECKMATE 200MM SEMI-AUTOMATIC PROBE STATION
    DescriptionDocumentsTechnical SpecificationsRelated Products
    CM-250
    Part Number
    CM-250
    Title
    CHECKMATE 200MM SEMI-AUTOMATIC PROBE STATION
    Applications
    CV/IV Measurements & Failure Analysis
    Automated Probing
    HF & RF Microwave Probing
    Probe Stations
    Description

    THE CHECKMATE 250 SEMI-AUTOMATIC PROBE STATION SERIES IS WELL KNOWN IN THE INDUSTRY AS A PROBE STATION WORK HORSE. ITS HEAVYDUTY MICROSCOPE STAGE ALLOWS INTEGRATION OF VARIOUS MICROSCOPES, LASERS, OUR DUAL BRIDGE FOR 2-IN-1 USE OF MICROSCOPES, LIGHT EMMITERS, CAMERA'S, PHOTONIC DEVICES, INTEGRATING SPHERES...YOU NAME IT. THE X-Y-Z MOTION CONTROL IS DRIVEN BY LEADSCREWS INTEGRATED WITH 0.1 MICRON LINEAR SCALES AND CLOSED-LOOP SERVO TECHNOLOGY. SIGNATONE'S PROBEMASTER SOFTWARE GIVES THE USER COMMAND OF ALL MOTION CONTROL, STEP-AND-REPEAT PROGRAMMING, WAFER MAPPING AND MORE. ADD OUR PRECISION CM-JOYSTICK WITH SMOOTH THUMB-WHEEL X-Y-Z CONTROL OF THE WAFER STAGE AND MICROSCOPE STAGE.

    Technical Specifications
    WAFER SAMPLE SIZE
    25MM 75MM 100MM 150MM 200MM
    SAMPLE HOLD DOWN
    INDEPENDENT CONTROLED VACUUM-ZONES
    CHUCK-STAGE MOVEMENT
    CLOSED-LOOP HIGH PRECISION SERVO MOTOR PID CONTROL
    XY TRAVEL OF THE CHUCK
    205MM X 205MM 8" X 8"
    CHUCK MATERIAL
    NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
    RESOLUTION STANDARD
    0.5 μm
    ACCURACY
    ±2.0 μm
    CHUCK PLANARITY
    <10 MICRONS
    CHUCK PLANARITY ADJUSTMENT
    YES
    CHUCK Z MOTION
    PROGRAMABLE
    CHUCK Z TRAVEL
    12.5MM (0.5 in)
    CHUCK Z RESOLUTION
    0.25 μm
    CHUCK Z ACCURACY
    ±2.0 μm
    CHUCK Z REPEATABILITY
    ±1.0 μm
    CHUCK Z STAGE DRIVE
    CLOSED-LOOP MICRO STEPPER MOTOR
    CHUCK THETA MOTION
    PROGRAMABLE
    THETA SETTING RANGE
    ±7.5° (15°)
    THETA RESOLUTION
    0.000035°
    THETA ACCURACY
    <1.0ΜM (MEASURED AT THE EDGE OF THE 200MM CHUCK)
    THETA REPEATABILITY
    <1.5 μm
    THETA STAGE DRIVE
    HIGH RESOLUTION STEPPER MOTOR, ROTARY ENCODER FEEDBACK SYSTEM
    CHUCK ROLL OUT STAGE
    YES PRESENTATION 195MM-190MM PRESENTATION
    PLATEN MATERIAL
    STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
    PLATEN Z ADJUSTMENT
    38MM WITH LOCK
    CONTACT NON CONTACT HANDLE OF THE PLATEN
    10MM
    PLATEN CONTACT REPEATABILITY
    ±1 MICRON
    OPTICAL STAGE DRIVE
    MANUAL-COARSE-FINE KNOB
    OPTICAL BRIDGE XY TRAVEL
    50MM X 50MM
    OPTICAL BRIDGE Z TRAVEL
    101 MM PNEUMATIC LIFT
    CALIBRATION CHUCK
    NO (OPTIONAL)
    LOCAL ENCLOSURE
    NO (AMBIENT to +300°C)
    OPTION
    PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA AND MORE