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    WL-250
    200MM SEMI-AUTOMATIC PROBE STATIONS
    DescriptionDocumentsTechnical SpecificationsRelated Products
    WL-250
    Part Number
    WL-250
    Title
    200MM SEMI-AUTOMATIC PROBE STATIONS
    Applications
    HF & RF Microwave Probing
    Probe Stations
    Thermal Characterization
    Description

    THE WAVELINK 250 (WL-250) 200MM SEMI-AUTOMATIC PROBE STATION SERIES IS PRIMARILY USED FOR DC, CV, HIGH POWER, RF AND TEMPERATURE CONTROL APPLICTIONS THAT DO NOT REQUIRE A LOCAL ENCLOSURE. THE LOCAL ENCLOSURE IS KEY FOR EMI AND/OR SUB-DEW TEMPURATURE PROBING AND IS AVAILABLE ON WL-250 SISTER SYSTEM, THE WL-250-LE. THE WL-250 HEAVYDUTY MICROSCOPE STATGE ALLOWS INTEGRATION OF VARIOUS MICROSCOPES, LASERS, OUR DUAL BRIDGE FOR 2-IN1 MICROSCOPE MOUNTING, CAMERA'S, PHOTONIC DEVICES, INTEGRATING SPHERES AND MORE. THE X-Y-Z MOTION CONTROL IS DRIVEN BY LEADSCREWS INTEGRATED WITH 0.1 MICRON LINEAR SCALES AND CLOSED-LOOP SERVO TECHNOLOGY. SIGNATONE'S PROBMASTER SOFTWARE GIVES THE USER COMMAND OF ALL MOTION CONTROL, STEP-AND-REPEAT PROGRAMMING, WAFER MAPPING AND MORE. ADD OUR PRECISION WL-JOYSTICK WITH SMOOTH THUMB-WHEEL X-Y-Z CONTROL OF THE WAFER STAGE, MICROSCOPE STAGE AND OPTIONAL COMPUTER AIDED PROBES (see CAP-946 micropositioners).

    Technical Specifications
    WAFER SAMPLE SIZE
    25MM 75MM 100MM 150MM 200MM
    SAMPLE HOLD DOWN
    INDEPENDENT CONTROLLED VACUUM-ZONES
    CHUCK-STAGE MOVEMENT
    CLOSED-LOOP HIGH PRECISION SERVO MOTOR PID CONTROL
    XY TRAVEL OF THE CHUCK
    205MM X 205MM 8" X 8"
    CHUCK MATERIAL
    NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
    RESOLUTION STANDARD
    0.5 μm
    ACCURACY
    ±2.0 μm
    CHUCK PLANARITY
    <10 MICRONS
    CHUCK PLANARITY ADJUSTMENT
    YES
    CHUCK Z MOTION
    PROGRAMABLE
    CHUCK Z TRAVEL
    12.5MM (0.5 in)
    CHUCK Z RESOLUTION
    0.25 μm
    CHUCK Z ACCURACY
    ±2.0 μm
    CHUCK Z REPEATABILITY
    ±1.0 μm
    CHUCK Z STAGE DRIVE
    CLOSED-LOOP MICRO STEPPER MOTOR
    CHUCK THETA MOTION
    PROGRAMABLE
    THETA SETTING RANGE
    ±7.5° (15°)
    THETA RESOLUTION
    0.000035°
    THETA ACCURACY
    <1.0ΜM (MEASURED AT THE EDGE OF THE 200MM CHUCK)
    THETA REPEATABILITY
    <1.5 μm
    THETA STAGE DRIVE
    HIGH RESOLUTION STEPPER MOTOR, ROTARY ENCODER FEEDBACK SYSTEM
    CHUCK ROLL OUT STAGE:
    YES PRESENTATION 195MM-190MM PRESENTATION
    PLATEN MATERIAL
    STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
    PLATEN Z ADJUSTMENT
    38MM WITH LOCK
    CONTACT NON CONTACT HANDLE OF THE PLATEN
    10MM
    PLATEN CONTACT REPEATABILITY
    ±1 MICRON
    OPTICAL STAGE DRIVE
    MANUAL-COARSE-FINE KNOBS
    OPTICAL BRIDGE XY TRAVEL
    50MM X 50MM
    OPTICAL BRIDGE Z TRAVEL
    101MM PNEUMATIC LIFT
    CALIBRATION CHUCK
    YES WITH OPTIONAL 2ND CAL CHUCK
    LOCAL ENCLOSURE
    NO, SEE WL-250-LE AND OUR OTHER LE OPTIONS
    OPTION
    PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA AND MORE