WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM 300mm
SAMPLE HOLD DOWN
INDEPENDENT CONTROLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
CLOSED-LOOP HIGH PRECISION SERVO MOTOR PID CONTROL
XY TRAVEL OF THE CHUCK
205MM X 205MM 12\" X 12\"
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
0.5 μm
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
CHUCK Z MOTION
PROGRAMABLE
CHUCK Z TRAVEL
12.5 mm (0.5 in)
CHUCK Z RESOLUTION
0.25 μm