CM-350
CHECKMATE 300MM SEMI-AUTOMATIC PROBE STATION
Part Number
CM-350
Title
CHECKMATE 300MM SEMI-AUTOMATIC PROBE STATION
Applications
Automated Probing
Probe Stations
Thermal Characterization
Description
.
Documents
CM-350 DATA SHEETTechnical Specifications
WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM 300mm
SAMPLE HOLD DOWN
INDEPENDENT CONTROLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
CLOSED-LOOP HIGH PRECISION SERVO MOTOR PID CONTROL
XY TRAVEL OF THE CHUCK
205MM X 205MM 12\" X 12\"
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
0.5 μm
ACCURACY
+- 2.0 μm
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
CHUCK Z MOTION
PROGRAMABLE
CHUCK Z TRAVEL
12.5 mm (0.5 in)
CHUCK Z RESOLUTION
0.25 μm
CHUCK Z ACCURACY
± 2.0 μm
CHUCK Z REPEATABILITY
± 1.0 μm
CHUCK Z STAGE DRIVE
CLOSED-LOOP MICRO STEPPER MOTOR
CHUCK THETA MOTION
PROGRAMABLE
THETA SETTING RANGE
± 7.5° (15°)
THETA RESOLUTION
0.000035°
THETA ACCURACY
< 1.0 ΜM (MEASURED AT THE EDGE OF THE 300 MM CHUCK)
THETA REPEATABILITY
< 1.5 μm
THETA STAGE DRIVE
HIGH RESOLUTION STEPPER MOTOR, ROTARY ENCODER FEEDBACK SYSTEM
CHUCK ROLL OUT STAGE
YES PRESENTATION 285MM
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
PLATEN Z ADJUSTMENT
38MM WITH LOCK
CONTACT NON CONTACT HANDLE OF THE PLATEN
10MM
PLATEN CONTACT REPEATABILITY
+-1 MICRON
OPTICAL STAGE DRIVE
MANUAL-COARSE-FINE KNOB
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z TRAVEL
101 MM PNEUMATIC LIFT
CALIBRATION CHUCK
OPTIONAL
THERMAL CAPABILITY
YES (AMBIENT to +200°C)
OPTION
PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA
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