300MM SEMI-AUTOMATIC PROBE SYSTEM WITH LOCAL ENCLOSURE

Part Number

WL-350-LE

Title

300MM SEMI-AUTOMATIC PROBE SYSTEM WITH LOCAL ENCLOSURE

Applications

HF & RF Microwave Probing
Automated Probing
Measurements
Low Current Analysis
Millimeter Wave Probing
Thermal Characterization

Description

300mm SEMI-AUTOMATIC PROBE STATION FOR RELIABLE, ACCURATE RF/DC/CV,AND HIGH-POWER THERMAL TEST MEASUREMENTS

Documents

Technical Specifications

WAFER SAMPLE SIZE

25MM 75MM 100MM 150MM 200MM 300MM

SAMPLE HOLD DOWN

INDEPENDENT CONTROLLED VACUUM-ZONES

CHUCK-STAGE MOVEMENT

CLOSED-LOOP HIGH PRECISION SERVO MOTOR PID CONTROL

XY TRAVEL OF THE CHUCK

305MM X 305MM 12″ X 12″

CHUCK MATERIAL

NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)

RESOLUTION STANDARD

0.5 μm

ACCURACY

0.5 μm

CHUCK PLANARITY

LESS-THAN 10 MICRONS

CHUCK PLANARITY ADJUSTMENT

YES

CHUCK Z MOTION

PROGRAMABLE

CHUCK Z TRAVEL

12.5 mm (0.5 in)

CHUCK Z RESOLUTION

0.25 μm

CHUCK Z ACCURACY

± 2.0 μm

CHUCK Z REPEATABILITY

± 1.0 μm

CHUCK Z STAGE DRIVE

CLOSED-LOOP MICRO STEPPER MOTOR

CHUCK THETA MOTION

PROGRAMABLE

THETA SETTING RANGE

± 10° (20°)

THETA RESOLUTION

0.000035°

THETA ACCURACY

< 1.0 ΜM (MEASURED AT THE EDGE OF THE 300 MM CHUCK)

THETA REPEATABILITY

< 1.5 μm

THETA STAGE DRIVE

HIGH RESOLUTION STEPPER MOTOR, ROTARY ENCODER FEEDBACK SYSTEM

CHUCK ROLL OUT STAGE

YES PRESENTATION 285MM-95%

PLATEN MATERIAL

STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER

PLATEN Z ADJUSTMENT

38MM WITH LOCK

PLATEN CONTACT SEPERATE

10MM

PLATEN CONTACT REPEATABILITY

±1 MICRON

OPTICAL STAGE DRIVE

MANUAL-COARSE-FINE KNOB

OPTICAL BRIDGE XY TRAVEL

50MM X 50MM

OPTICAL BRIDGE Z TRAVEL

101 MM PNEUMATIC LIFT

CALIBRATION CHUCK

YES OPTIONAL 2ND CHUCK

LOCAL ENCLOSURE

YES (-65°C to +300°C)

OPTION

PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA

Accessories For Test Stations

Resistivity Test Systems

Probe Stations

Probe Tips & Holders

Micropositioners

Resistivity Testing

RF - Microwave Test Solutions

DC- CV/IV Analytical Probing

High Power Characterization