CHECKMATE 200MM HIGH PRECISION MANUAL PROBE STATION

Part Number

CM-210

Title

CHECKMATE 200MM HIGH PRECISION MANUAL PROBE STATION

Applications

CV/IV Measurements & Failure Analysis
Manual Analytical Probing
Measurements
MEMS Probing
Probe Stations

Description

Documents

Technical Specifications

WAFER SAMPLE SIZE

25MM 75MM 100MM 150MM 200MM

SAMPLE HOLD DOWN

INDEPENDENT CONTROLED VACUUM-ZONES

CHUCK-STAGE MOVEMENT

PRECISION LEADSCREW – CARRIAGE AND RAILS

XY TRAVEL OF THE CHUCK

203MM X 203MM 8\” X 8\”

CHUCK MATERIAL

NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)

RESOLUTION STANDARD

14 ΜM PER DEGREE OF KNOB ROTATION

RESOLUTION FINE

1.5 ΜM PER DEGREE OF KNOB ROTATION

CHUCK PLANARITY

LESS-THAN 10 MICRONS

CHUCK PLANARITY ADJUSTMENT

YES

CHUCK Z TRAVEL

2.5MM PRECISSION PNEUMATIC LIFT

THETA SETTING RANGE

± 11° (22°)

THETA RESOLUTION

0.01MM PER DEGREE OF KNOB ROTATION

THETA STAGE DRIVE

HIGH RESOLUTION MICROMETER

CHUCK ROLL OUT STAGE

OPTIONAL PRESENTATION 190MM

PLATEN MATERIAL

STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER

PLATEN Z ADJUSTMENT

38MM WITH LOCK

CONTACT NON CONTACT HANDLE OF THE PLATEN

10MM

PLATEN CONTACT REPEATABILITY

+-1 MIFRON

OPTICAL STAGE DRIVE

MANUAL-COARSE-FINE KNOB

OPTICAL BRIDGE XY TRAVEL

50MM X 50MM

OPTICAL BRIDGE Z TRAVEL

101 MM PNEUMATIC LIFT

LOCAL ENCLOSURE

NOT AVAILABLE ON UPGRADED SYSTEM

OPTION

PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA

Accessories For Test Stations

Resistivity Test Systems

Probe Stations

Probe Tips & Holders

Micropositioners

Resistivity Testing

RF - Microwave Test Solutions

DC- CV/IV Analytical Probing

High Power Characterization