WL-170-THZ STABLE MANUAL RF-mmW PROBE STATION

Part Number

WL-170-THZ

Title

WL-170-THZ STABLE MANUAL RF-mmW PROBE STATION

Applications

HF & RF Microwave Probing
CV/IV Measurements & Failure Analysis
DC To THz Probe Head Selection
Frequency Extenders and Tuners
Millimeter Wave Probing

Description

WL-170-THZ PROBE STATIONS DESIGNED FOR RELIABLE AND ACCURATE TEST OF mmW, THz, AND INPEDANCE TUNER APPLICATIONS

Documents

Technical Specifications

WAFER SAMPLE SIZE

25MM 75MM 100MM 150MM 200MM

SAMPLE HOLD DOWN

INDEPENDENT CONTROLLED VACUUM-ZONES

CHUCK-STAGE MOVEMENT

MANUAL GEAR-DRIVE STAGE

XY TRAVEL OF THE CHUCK

203MM X 203MM 8″ X 8″

CHUCK MATERIAL

NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)

RESOLUTION STANDARD

75-MICRON PER DEGREE OF KNOB REVOLUTION

RESOLUTION FINE

1-MICRON AT 250-MICRONS OF KNOB REVOLUTION

CHUCK POSITION

CHUCK ABOVE THE PLATEN

CHUCK PLANARITY

LESS-THAN 10 MICRONS

CHUCK PLANARITY ADJUSTMENT

YES

CHUCK Z TRAVEL

2.5MM PRECISION PNEUMATIC LIFT

THETA SETTING RANGE

± 11° (22°)

THETA RESOLUTION

0.01MM PER DEGREE OF KNOB ROTATION

THETA STAGE DRIVE

HIGH RESOLUTION MICROMETER

CHUCK ROLL OUT STAGE

YES PRESENTATION 190MM

PLATEN MATERIAL

STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER

PLATEN Z ADJUSTMENT

38MM WITH LOCK

PLATEN CONTACT SEPERATE

10MM

PLATEN CONTACT REPEATABILITY

+-1 MICRON

OPTICAL STAGE DRIVE

MANUAL-COARSE-FINE KNOB

OPTICAL BRIDGE XY TRAVEL

50MM X 50MM

OPTICAL BRIDGE Z TRAVEL

101 MM PNEUMATIC LIFT

CALIBRATION CHUCK

YES OPTIONAL 2ND CHUCK

LOCAL ENCLOSURE

NOT STANDARD – AVAILABLE ON UPGRADED SYSTEM

OPTION

PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA

Accessories For Test Stations

Resistivity Test Systems

Probe Stations

Probe Tips & Holders

Micropositioners

Resistivity Testing

RF - Microwave Test Solutions

DC- CV/IV Analytical Probing

High Power Characterization