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    CM-170
    CHECKMATE HIGH STABILITY MANUAL ANALYTICAL PROBE STATION
    DescriptionDocumentsTechnical SpecificationsRelated Products
    CM-170
    Part Number
    CM-170
    Title
    CHECKMATE HIGH STABILITY MANUAL ANALYTICAL PROBE STATION
    Applications
    CV/IV Measurements & Failure Analysis
    Manual Analytical Probing
    Probe Stations
    Low Current Analysis
    Description

    .

    Technical Specifications
    WAFER SAMPLE SIZE
    25MM 75MM 100MM 150MM 200MM
    SAMPLE HOLD DOWN
    INDEPENDENT CONTROLED VACUUM-ZONES
    CHUCK-STAGE MOVEMENT
    MANUAL GEAR-DRIVE STAGE
    XY TRAVEL OF THE CHUCK
    203MM X 203MM 8\" X 8\"
    CHUCK MATERIAL
    NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
    RESOLUTION STANDARD
    75-MICRON PER DEGREE OF KNOB REVOLUTION
    RESOLUTION FINE
    1-MICRON AT 250-MICRONS OF KNOB REVOLUTION
    CHUCK PLANARITY
    LESS-THAN 10 MICRONS
    CHUCK PLANARITY ADJUSTMENT
    YES
    THETA SETTING RANGE
    360 DEGREES
    THETA ROTATION LOCK
    OPTIONAL
    PLATEN MATERIAL
    STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
    PLATEN Z ADJUSTMENT
    38MM WITH LOCK
    PLATEN CONTACT SEPERATE
    10MM
    PLATEN CONTACT REPEATABILITY
    +-1 MICRON
    OPTICAL STAGE DRIVE
    MANUAL-COARSE-FINE KNOB
    OPTICAL BRIDGE XY TRAVEL
    50MM X 50MM
    OPTICAL BRIDGE Z TRAVEL
    101 MM PNEUMATIC LIFT
    CHUCK ROLL OUT STAGE
    NOT STANDARD - AVAILBLE ON UPGRADED SYSTEM
    LOCAL ENCLOSURE
    NO (AVAILBLE ON UPGRADED SYSTEM)
    OPTION
    PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA