CM-170
CHECKMATE HIGH STABILITY MANUAL ANALYTICAL PROBE STATION
Part Number
CM-170
Title
CHECKMATE HIGH STABILITY MANUAL ANALYTICAL PROBE STATION
Applications
CV/IV Measurements & Failure Analysis
Manual Analytical Probing
Probe Stations
Low Current Analysis
Description
.
Documents
CM-170 DATA SHEETTechnical Specifications
WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM
SAMPLE HOLD DOWN
INDEPENDENT CONTROLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
MANUAL GEAR-DRIVE STAGE
XY TRAVEL OF THE CHUCK
203MM X 203MM 8\" X 8\"
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
75-MICRON PER DEGREE OF KNOB REVOLUTION
RESOLUTION FINE
1-MICRON AT 250-MICRONS OF KNOB REVOLUTION
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
THETA SETTING RANGE
360 DEGREES
THETA ROTATION LOCK
OPTIONAL
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
PLATEN Z ADJUSTMENT
38MM WITH LOCK
PLATEN CONTACT SEPERATE
10MM
PLATEN CONTACT REPEATABILITY
+-1 MICRON
OPTICAL STAGE DRIVE
MANUAL-COARSE-FINE KNOB
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z TRAVEL
101 MM PNEUMATIC LIFT
CHUCK ROLL OUT STAGE
NOT STANDARD - AVAILBLE ON UPGRADED SYSTEM
LOCAL ENCLOSURE
NO (AVAILBLE ON UPGRADED SYSTEM)
OPTION
PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA
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