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    CM-210
    CHECKMATE 200MM HIGH PRECISION MANUAL PROBE STATION
    DescriptionDocumentsTechnical SpecificationsRelated Products
    CM-210
    Part Number
    CM-210
    Title
    CHECKMATE 200MM HIGH PRECISION MANUAL PROBE STATION
    Applications
    CV/IV Measurements & Failure Analysis
    Manual Analytical Probing
    Measurements
    MEMS Probing
    Probe Stations
    Description

    .

    Technical Specifications
    WAFER SAMPLE SIZE
    25MM 75MM 100MM 150MM 200MM
    SAMPLE HOLD DOWN
    INDEPENDENT CONTROLED VACUUM-ZONES
    CHUCK-STAGE MOVEMENT
    PRECISION LEADSCREW – CARRIAGE AND RAILS
    XY TRAVEL OF THE CHUCK
    203MM X 203MM 8\" X 8\"
    CHUCK MATERIAL
    NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
    RESOLUTION STANDARD
    14 ΜM PER DEGREE OF KNOB ROTATION
    RESOLUTION FINE
    1.5 ΜM PER DEGREE OF KNOB ROTATION
    CHUCK PLANARITY
    LESS-THAN 10 MICRONS
    CHUCK PLANARITY ADJUSTMENT
    YES
    CHUCK Z TRAVEL
    2.5MM PRECISSION PNEUMATIC LIFT
    THETA SETTING RANGE
    ± 11° (22°)
    THETA RESOLUTION
    0.01MM PER DEGREE OF KNOB ROTATION
    THETA STAGE DRIVE
    HIGH RESOLUTION MICROMETER
    CHUCK ROLL OUT STAGE
    OPTIONAL PRESENTATION 190MM
    PLATEN MATERIAL
    STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
    PLATEN Z ADJUSTMENT
    38MM WITH LOCK
    CONTACT NON CONTACT HANDLE OF THE PLATEN
    10MM
    PLATEN CONTACT REPEATABILITY
    +-1 MIFRON
    OPTICAL STAGE DRIVE
    MANUAL-COARSE-FINE KNOB
    OPTICAL BRIDGE XY TRAVEL
    50MM X 50MM
    OPTICAL BRIDGE Z TRAVEL
    101 MM PNEUMATIC LIFT
    LOCAL ENCLOSURE
    NOT AVAILABLE ON UPGRADED SYSTEM
    OPTION
    PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA