CHECKMATE 200MM HIGH PRECISION MANUAL PROBE STATION
CM-210
Part Number
CM-210
Title
CHECKMATE 200MM HIGH PRECISION MANUAL PROBE STATION
Applications
CV/IV Measurements & Failure Analysis
Manual Analytical Probing
Measurements
MEMS Probing
Probe Stations
Description
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Documents
CM-210 DATA SHEETLast Updated: 2024-04-04T21:57:51.499ZCM-210 FACT SHEETLast Updated: 2024-04-04T21:57:51.499ZTechnical Specifications
WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM
SAMPLE HOLD DOWN
INDEPENDENT CONTROLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
PRECISION LEADSCREW – CARRIAGE AND RAILS
XY TRAVEL OF THE CHUCK
203MM X 203MM 8\" X 8\"
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
14 ΜM PER DEGREE OF KNOB ROTATION
RESOLUTION FINE
1.5 ΜM PER DEGREE OF KNOB ROTATION
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
CHUCK Z TRAVEL
2.5MM PRECISSION PNEUMATIC LIFT
THETA SETTING RANGE
± 11° (22°)
THETA RESOLUTION
0.01MM PER DEGREE OF KNOB ROTATION
THETA STAGE DRIVE
HIGH RESOLUTION MICROMETER
CHUCK ROLL OUT STAGE
OPTIONAL PRESENTATION 190MM
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
PLATEN Z ADJUSTMENT
38MM WITH LOCK
CONTACT NON CONTACT HANDLE OF THE PLATEN
10MM
PLATEN CONTACT REPEATABILITY
+-1 MIFRON
OPTICAL STAGE DRIVE
MANUAL-COARSE-FINE KNOB
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z TRAVEL
101 MM PNEUMATIC LIFT
LOCAL ENCLOSURE
NOT AVAILABLE ON UPGRADED SYSTEM
OPTION
PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA
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