Signatone CM -310 300mm High Precision Manual Probe System

Designed for a Variety of On-Wafer Analytical

Measurement Applications

• DC, CV/IV, pulsed –IV applications
• High Power Application up to 12KV /600A
• IC Design / test verification Ambient to +200°C
• RF applications up to 110GHz with 2 & 4 port setup

Product Versatility

• Designed for full or partial wafer probing
• Ultra-Stable solid base for sub-µ probing
• Variable Probe, Chuck, and Microscope configuration.
• Upgradable to motorized - Joy Stick or Semi-Automatic /step & repeat control
• Active Vibration Isolation table (optional)
• Hot Chuck System +200°C (optional)

Standard Features

• Ultra-stable 50mm thick Al base
• Fast and Fine control of DUT X-Y Knobs
• Three - Point Chuck planarization
• Micrometer Driven Chuck Theta-Rotation
• Selectable Pin-Hole Vacuum Zones
• Continuous Platen Lift (CVL) for ease of

probe and DUT exchange.

• Fine Platen Lift with lock for DUT/probe setup
• Large Platen (Steel or Aluminum available*)
• Ultras Stable Linear Microscope Stage

Features / Benefits

Specifications

Probe Platen

Sample 2: Probe Configured with 2 RF + 4 DC Probes

Sample 1: Probe Configured with 10 DC Probes

• ONE PLATEN - Three BENFITS

Signatone Multi Benefit /Two in One Platen Features:

• “Quick Lift” with CVL for easy probe to

pad separation and alignment

• “Fine Adjust” for Probe card and variable

Chucks and DUT thickness setup

• “Position Lock” allows for secure “lock”

of user defined platen height setup

Non-Thermal Chucks

Signatone Thermal Chucks

*All data is relevant for chucks in ECO mode

Choose the Micro Positioner that’s best for your application (more positioner configurations available)

The CheckMate Series probe stations include an Aluminum or Steel Platen for use with Vacuum or Magnetic based micro Positioners

• The S-926 Series with 100 TPI rectilinear X-Y-Z motion, good for probing down to

one micron, at a very competitive price

• The SP-100 Series with 100 TPI linear

X-Y-Z motion with in-line micrometer knobs for high precision probing one-micron features at high magnification – great for use with multi probe applications

• The SP-150 Series with 100 TPI linear

X-Y-Z motion with in-line micrometer knobs for ultra precision probing sub-micron features at high magnification – great for use with multi probe applications

• The S-M40 Series RF Positioner with 50 TPI linear X-Y-Z motion with in-line precision knobs for quick and accurate positioning of RF probes – great for use with RF and Wedge probe applications DC-110GHz.
• The S-M90 Series RF Positioner with 50 TPI linear X-Y-Z motion with precision knobs at 90° for quick and accurate positioning of RF probes – great for use with RF and Wedge probe applications DC-110GHz.
• The CAP-946 Series Motorized Positioner with Software controlled X-Y Z 20nm resolution. Including 25mm X-Y travel (8mm “Z”) Software, Joys Stick & Thumbwheel Control

(excellent for use with Dark box or Gove box applications)

Micro Positioner

S-926Plm

Sp-100Pm

Sp-150Pm

S-M40-Mmew

S-M90-Mmew

Cap-946M

Dc Probe –Selection Guide

Coax Probe

Triax Probe

Coax Kelvin Probe

• High Voltage/High Current PROBE –SELECTION GUIDE

Hvp-Cx-3

Hvp-Tx-3

Hvp-Cx-10

Hcp-100

*All leakage tests conducted in an enclosed environment with Keithley 4200, or equivalent, in sampling mode with 10 PLC, auto-ranging. 0.25s interval

Rf Probe –Selection Guide

M-Vac

AC Linear Piston – (Small) Quiet Vacuum Pump

Supports vacuum hold-down of DUT and mounting of

1-10 Micro-positioners

(11 in. Hg @ 115VAC /428 mbar @ 230V AC)

• Includes Power Cord, On/Off Switch, 10’ flexible vacuum tubing, 5Amp Fuse, Vibration dampening feet, Easy grip handle

System Options – Accessories

Probe Station Dark Box (PSDB-CM)

Probe Station light tight, electrically shielded enclosure

Excellent for use in conjunction with the following:

• Low-Leakage measurements
• High-Power measurements
• Thermal measurements
• Light-Sensitive measurements

Door and Panel interlock options are typically used for

High Voltage and High Temperature safety

Probe Card Adapter (S-4710)

For use with 4.5” wide probe cards

Cm-Bmvc

Board Mount Vice Chuck

The CheckMate Series probe stations supports the

200mm x 200mm adjustable Vice chuck

• For clamping various size and shaped devices, packaged parts, PCB’s, single chips, MEMS, BioMEMS or virtually anything you want to hold view and probe

(VICE Clamps are non-conductive ULTEM)

Front

Back

Psdb-Cm

S-4710

System Dimensions – Table Optional

CM-310 / including microscope*

* Can vary dependent on microscope selection

System Dimensions Including Table

CM-310 / Vibration Isolation Table /Monitor Mount

* Can vary dependent on monitor, Microscope selection and position

Warranty

• Standard Warranty 12 months *
• For Extended Warranty and Service Contracts : Contact Signatone Corp. for more information
• North America: Sales.NA@signatone.com
• Europe: Sales.Europe@signatone.com
• Asia: Sales.Asia@signatone.com

* See Signatone Corporate Terms and Conditions of Sale for further details.