Ergonomics and Optional Configurations
Multi – Use
(magnetic or vacuum mount)
| Specifications | |
|---|---|
| Design | Four Post Support |
| Dimension | L = 260.25.5mm x W = 406mm x H = 12.7mm 10.25” x 16” x 0.5” |
| Chuck to Platen Top | Min. 12.7mm (Variable Separation with Fine Platen Adjust) |
| Max. No of Micro Positioners | 6 x DC |
| Quick Platen Lift Control (CVL) | Continuous Variable Lift (0 to 12.7mm) |
| Contact Repeatability | < 1 µm (0.04 mils) by Manual Control |
| Micro Positioner Mounting | Magnetic (vacuum optional) |
Sample Configured with 4 DC Probes
Platen “Fine Adjust”
Platen “Quick Lift”
Signatone Multi Benefit Ergonomically Correct Platen Adjust and Features:
Probe Station Dark Box (PSDB-100)
Probe Station light tight, electrically shielded enclosure
Excellent for use in conjunction with the following:
H-710 Probe Card Adapter
The probe card adapter is used to mount all standard 4.5” wide probe cards to the platen of the H-150 Prober. Standard models are available in 5” or 6” lengths with 48 to 72 pin connectors. Please call the factory for probe card adapters of wider dimensions, or double ended connectors, etc.
HK-18 Clamp Chuck
Two-sided hybrids or samples that cannot be held with vacuum may be held in place by means of the HK-18 Clamp Chuck. The Hk-18 is a miniature vise that grips the two edges of DUT. The HK-18 will accept samples up to 3.5” wide. After clamping the DUT in place the entire assembly is place on the vacuum chuck and held by chuck vacuum.
Custom Size Thru Hole
(default .508mm/.020”)
63.5mm /2.5”
31.75mm /1.25”
3.175mm / .125”
WL - DC Device Chuck - for holding single devices
Top/Front View
Front
Back
AC Linear Piston – (Small) Quiet Vacuum Pump
Supports vacuum hold-down of DUT and mounting of 1-10 Micro-positioners
(11 in. Hg @ 115VAC /428 mbar @ 230V AC)
Choose the Micro Positioner that’s best for your application (more positioner styles available)
The H-150 Series probe stations include a Steel Platen for use with Magnetic based (vacuum base optional) micro Positioners.
X-Y-Z motion with in-line micrometer knobs for high precision probing sub-micron features at high magnification – great for use with multi probe applications
The Signatone “S” Series probe tip holders offer options for length, type of probe mount, and shape of probe arm.
The # 4 option when referring to the
shape indicates that it has an “L” bend
2”- 3” from positioner mount.
This option is recommended for use with the H-150 Series prober
The standard Signatone Shielded probe tip holder includes a 24” 50 mini coax cable w/ BNC termination, Delrin, Teflon, or Ceramic isolation piece, Cable clamp–strain relief and Probe tip mounting mechanism including Spring-Clip, or Screw-Lock.
BNC Connector
Mini Coax Cable
Probe Mount Screw
Probe Tip
Coax Cable Clamp
Isolation Piece
Coax Sense
Coax Shield
Tapered End for Mounting
in Micropositioner
Probe Tip Mounting End
“L” Bend Shaft (option 4)
| Typical Specifications of Signatone Thermal Technology | |
|---|---|
| 100mm Standard Hot | |
| Temperature Range | +25°C to +300°C |
| Connectivity | Coax (m) |
| Temperature control method | Liquid Cooled / Resistance heater |
| Coolant | Water |
| Smallest temperature selection step | 0.1°C |
| Chuck temperature display resolution | 0.01°C |
| External touchscreen display operation | Yes |
| Temperature stability | ±0.1°C |
| Temperature accuracy | ±0.5°C |
| Control method | Low noise DC/PID |
| Interfaces | RS232C |
| Optional Interfaces | GP-IB |
| Chuck surface plating | Nickel (gold optional) |
| Temperature sensor | RTD |
| Temperature uniformity | ±0.5°C at ≤ 200°C ±1. °C at > 200°C |
| Surface flatness | < ±1 µm |
| Electrical isolation - Coax BNC (m) / SHV Triax | 150nA |
| Heating Rates | 25°C to 300°C < 4 min |
| Cooling Rates | 300°C to 25°C < 2.5 min |
| Leakage @ 10 V Kelvin Triax | N/A |
| Residual Capacitance | |
| Maximum voltage between chuck top and GND | 500V |
| 3 Safety Circuits | Yes |
| Vacuum Pattern | Rings |
| Vacuum Zone (DUT Size) | 5mm, 50mm, 100mm |
| System Controller / Dimensions /Weight / Power Consumption | ||||
|---|---|---|---|---|
| System Model | W x D x H (mm) | Weight (kg) | Weight (Lbs.) | Power cons. (VA) |
| S-1080 | 432 x 483 x 267 | 20.4 | 45 | 2000 |
| TC-II | 355 x 711 x 610 | 50.8 | 112 | 1500 |
| Dimensions (L x D x H) | 375mm x 508mm x 390mm * (14.76” x 20” x 15.35”*) |
|---|---|
| Weight | 34kg (75 lbs.) |
H-150 / including microscope*
* Can very dependent on platen adjust, shelf, and microscope selection
* See Signatone Corporate Terms and Conditions of Sale for further details.
Configure this system with our engineers — factory‑direct from Gilroy, California.