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Data Sheet · RF / mmW Probe Systems
Signatone WL-170 -THZ 200 mm Manual Probe System Industry proven probe system designed for reliable and accurate test of mmW, THz, and impedance tuner applications.
Ergonomics and Optional Configurations
Features / Benefits
Multi – Use
- Designed for a wide variety of banded, differential or broadband frequency extenders and automated impedance tuners.
- Robust design and seamless integration of extenders/tuners provides a maximum of measurement dynamics
- Ease of use / single-handed X-Y Stage knobs for quick movement plus fine knob control
- Quick platen lift with adjustable platen separation
- Chuck fine rotation and lock
- Large reinforced platen accepts “Large Area
Positioners (S-LAP90 and S-LAP-XL)
- Available in multiple configurations including a variety of chuck options, DC/RF/mmW Micro positioners, microscopes, camera’s, PCB holders, and more.
- Optional Instrumentation racks, Vibration Isolation tables, Thermal chuck, and more.
Specifications
Probe Platen
| Specifications | |
|---|---|
| Design | Ultra-Stable: Four Post Support |
| Dimension | Large Area Platen: (See drawings) |
| Chuck to platen Top | Min. 14.7mm (Variable Separation with Fine Platen Adjust) |
| Max. No of Micro Positioners | 2xmmW E/W + 2x RF N/S and 2 DC or 2 x mmW E/W and 8x DC |
| Quick Platen Lift Control (CVL) | Continuous Variable Lift (0 to 3.175mm) |
| Contact Repeatability | < 1 µm (0.04 mils) by Manual Control |
| mmW MicroPositioner mounting | Bolt Down |
| RF MicroPositioner mounting | Magnetic or Bolt Down |
| DC MicroPositioner mounting | Magnetic or Vacuum |
Universal Platen Designed for Multiple Probe Configurations
Sample Configured with 2 mmW and 2 RF Probes
- ONE PLATEN x 4 BENFITS
Signatone Multi Benefit Ergonomically Correct Platen Adjust and Features:
- “Quick Lift” with CVL for easy probe to pad separation and alignment
- “Fine Adjust” for Probe card and variable Chucks and DUT thickness setup
- “Position Lock” allows for secure “lock” of user defined platen height setup
- “Thermal Isolation” maintains a safe temperature of probes and platen surface while chuck is at extreme temperatures (optional)
Platen “Fine Adjust” and “Position Lock”
Platen “Quick Lift”
- Frequency Extenders - Sample Configurations
KeySight Frequency Extender
Mounted on S-M40 Positioner
Copper Mountain Technologies Frequency Extender
Mounted on S-LAP90 Positioner
Rohde & Schwarz Frequency Extender
Virginia Diodes Inc. (VDI) Frequency Extender
ANRITSU Frequency Extender
| Auxiliary Chuck | |
|---|---|
| Quantity | 2 AUX chucks |
| Position | Independently isolated (located on back left and right ) |
| Substrate Size (L x W) | Max 25mm x 25mm (1”x 1”) |
| Material | Ceramic, Ultem, or NI plated brass |
| Surface Planarity | ≤± 5µm |
| Vacuum Control | Controlled independently, separate from wafer chucks |
| Standard Wafer Chuck | |
|---|---|
| Connectivity | Coax BNC (m) |
| Diameter | 203mm |
| Material | Nickel Plated Brass (gold optional) |
| Chuck surface | Zone selector knob with Peppered vacuum patterns |
| Vacuum hole pattern sections(diameter) | 22mm, 50mm, 91mm, 135mm, 168mm |
| Vacuum actuation | Selector Knob allows individual activation of vacuum zones |
| Supported DUT sizes | 25mm, 75mm, 100mm, 150mm, 200mm |
| Surface planarity | ±6.5µ |
| Rigidity | <3µ / 10N at edge of the chuck |
| Electrical Specification (Coax) | |
| Operation voltage | Designed for operation at -200V to + 200VDC |
| Maximum voltage between chuck top | 500 V DC |
| and GND | |
| Isolation | > 150 GΩ |
| Wafer Chuck (Triaxial) | |
| Connectivity | Triax (m) |
| Diameter | 203mm |
| Material | Gold Plated Brass |
| Chuck surface | Independent Vacuum zones with vacuum rings |
| Vacuum hole pattern sections(diameter) | 0mm, 65mm, 112mm, 162mm |
| Vacuum actuation | Multi-Zone Adjustable Control |
| Supported DUT sizes | 3mm, 75mm, 125mm, 200mm |
| Surface planarity | ± 5µm |
| Rigidity | <3µm / 10N near at edge of the chuck |
| Electrical Specification (Triax) | |
| Chuck isolation | Measured @ 10V DC |
| Force to guard | > 2 TΩ |
| Guard to shield | > 7 TΩ |
| Force to shield | > 15 TΩ |
Non-Thermal Chucks
| Typical Specifications of Signatone Thermal Technology | |||
|---|---|---|---|
| 200mm Standard Hot | 200mm Hot/ Triax | 200mm Hot/ 3kV Triax | |
| Temperature Range | +25°C to +300°C | +25°C to +200°C | +25°C to +200°C |
| Connectivity | Coax (m) | Triax (m) | SHV Triax (m) |
| Temperature control method | Liquid Cooled / Resistance heater | Liquid Cooled / Resistance heater | Liquid Cooled / Resistance heater |
| Coolant | Water | Water | Water |
| Smallest temperature selection step | 0.1°C | 0.1°C | 0.1°C |
| Chuck temperature display resolution | 0.01°C | 0.01°C | 0.01°C |
| External touchscreen display operation | Yes | Yes | Yes |
| Temperature stability | ±0.1°C | ±0.1°C | ±0.1°C |
| Temperature accuracy | ±0.5°C | ±0.5°C | ±0.5°C |
| Control method | Low noise DC/PID | Low noise DC/PID | Low noise DC/PID |
| Interfaces | RS232C | RS232C | RS232C |
| Optional Interfaces | GP-IB | GP-IB | GP-IB |
| Chuck surface plating | Nickel | Gold | Gold |
| Temperature sensor | RTD | RTD | RTD |
| Temperature uniformity | ±0.5°C at ≤ 200°C ±1. °C at > 200°C | ±0.5°C at ≤ 100°C ±2.5°C at 200°C | ±0.5°C at ≤ 100°C ±3.5°C at 200°C |
| Surface flatness | < ±1 µm | < ±8µm | < ±15µm |
| Electrical isolation - Coax BNC (m) / SHV Triax | 150nA | > 5TΩ | > 5TΩ |
| Heating Rates | 25°C to 300°C < 12 min | 25°C to 200°C < 9 min | 25°C to 200°C < 28 min |
| Cooling Rates | 300°C to 25°C < 9 min | 200°C to 25°C < 8 min | 200°C to 25°C < 8 min |
| Leakage @ 10 V Kelvin Triax | N/A | <25fA | <400fA |
| Residual Capacitance | <200fF | <1pF | |
| Maximum voltage between chuck top and GND | 500V | 500V | 3kV |
| 3 Safety Circuits | Yes | Yes | Yes |
| Vacuum Pattern | Rings | Pin hole | Pin hole |
| Vacuum Zone (DUT Size) | 50, 100, 150, 200mm | 2, 50, 100, 150, 200mm | 2, 50, 100, 150, 200mm |
| System Controller / Dimensions /Weight / Power Consumption | ||||
|---|---|---|---|---|
| System Model | W x D x H (mm) | Weight (kg) | Weight (Lbs.) | Power cons. (VA) |
| S-1080 | 432 x 483 x 267 | 20.4 | 45 | 2000 |
| TC-II | 355 x 711 x 610 | 50.8 | 112 | 1500 |
| 2XRC-89HL | 559 x 610 x 915 | 135 | 297 | 3700 |
Signatone Thermal Chucks
| System Controller / Chiller Dimensions and Power / Air Consumption | ||||
|---|---|---|---|---|
| System type | W x D x H (mm) | Weight (kg) | Power cons. (VA) | max. Air flow (l/min) |
| 25 to 200 °C | 300 x 360 x 135 | 12 | 1300 | 220 |
| 25 to 300 °C | 300 x 360 x 135 | 12 | 1300 | 220 |
*All data are relevant for chucks in ECO mode
| Specifications of ERS/ SIGNATONE Technology HV 200mm Chucks | ||
| Temperature Range | 25°C to 200°C | 25°C to 300°C |
| Connectivity | Kelvin Triax (M),3kV or 10 kV Coaxial | Kelvin Triax (M),3kV or 10 kV Coaxial |
| Temperature control method | Cooling air / Resistance heater | Cooling air / Resistance heater |
| Coolant | Air (user supplied) | Air (user supplied) |
| Smallest temperature selection step | 0.1°C | 0.1°C |
| Chuck temperature display resolution | 0.01°C | 0.01°C |
| External touchscreen display (optional) | Yes | Yes |
| Temperature stability | ±0.08°C | ±0.08°C |
| Temperature accuracy | ±0.1°C | ±0.1°C |
| Control method | Low noise DC/PID | Low noise DC/PID |
| Interfaces | RS232C | RS232C |
| Chuck surface plating | Gold plated with pinhole surface | Gold plated with pinhole surface |
| Temperature sensor | Pt100 1/3DIN 4-line wired | Pt100 1/3DIN 4-line wired |
| Temperature uniformity | < ±0.5°C at ≤ 200°C | < ±0.5°C at ≤ 300°C |
| Surface flatness and base parallelism | < ±10 µm | < ±10 µm |
| Heating and Cooling Rates* | 25°C to 200°C <30min 200°C to 25°C <30min | 25°C to 300°C <35min 300°C to 25°C <35min |
| Leakage @ 3000V Kelvin Triax (M) | ||
| 25°C | 5pA | 5pA |
| 200 °C | 10pA | 10pA |
| 300°C | -- | 15pA |
| Leakage @ 10kV Coax UHV/SHV (M) | ||
| 25°C | 6nA | 6nA |
| 200 °C | 6nA | 6nA |
| 300°C | -- | 6nA |
| Maximum voltage between chuck top and GND | 10 kV DC | 10 kV DC |
Ers High Power Thermal Chucks
| Dimensions (L x D x H) | 660 x 813 x 610mm (26 x 32 x 24”) |
|---|---|
| Weight | 100 kg (220.46 lbs.) |
WL-170 THZ / including microscope*
* Can very dependent on monitor, frequency extender, shelf, and microscope selection
System Dimensions Including Table
- Standard Warranty 12 months *
- For Extended Warranty and Service Contracts : Contact Signatone Corp. for more information
- North America: Sales.NA@signatone.com
- Europe: Sales.Europe@signatone.com
- Asia: Sales.Asia@signatone.com
* See Signatone Corporate Terms and Conditions of Sale for further details.
Warranty
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