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Data Sheet · RF / mmW Probe Systems
Signatone WL-210-LE 200 mm Manual Probe System with
Local Enclosure for reliable and accurate DC/CV, RF and mmW measurements
Features / Benefits
Multi – Use
- Designed for a wide variety of applications including: Failure Analysis, RF and mmW wafer Level Reliability and Device Characterization.
Local Enclosure for Accurate Measurements
- Designed for advanced EMI / RFI / Light-Tight Shielding.
- FemtoAmp low-leakage abilities
- Accepts Temperatures: -60 °C to +300 °C
Ergonomics and Optional Configurations
- Easy use of X-Y Stage knobs located in the front –right side of the prober. (away from thermal chuck)
- Available in multiple configurations including a variety of chuck options, DC/RF/mmW Micro positioners, microscopes, camera’s, lasers for various applications
- Local enclosure included in system configuration
Specifications
Probe Platen
| Specifications | |
|---|---|
| Material | Nickel Plated Steel (Al optional) |
| Dimension | L = 580mm x W = 637mm x H = 12.7mm (See drawing) |
| Chuck to Thermal Shield Separation | Min. 2 mm (Variable Separation with Fine Platen Adjust) |
| Max. No of Micro Positioners | 8x DC or 4x DC + 2x RF or 2x DC + 4x RF or 4x DC + 4x RF |
| Quick Platen Lift Control (CVL) | Continuous Variable Lift (0 to 3.175 mm) |
| Contact Repeatability | < 1 µm (0.04 mils) by Manual Control |
| RF MicroPositioner mounting | Magnetic or Bolt Down |
| DC MicroPositioner mounting | Magnetic or Vacuum |
| Thermal Isolation (Optional) | Platen Temp = +15 °C to +40°C /chuck @ -60 °C to +300°C |
Universal Platen Designed for Multiple Probe Configurations
Sample Probe Configured with 4 RF + 2 DC Probes
Sample Probe Configured with 8 DC Probes
- ONE PLATEN x 4 BENFITS
Signatone Multi Benefit Ergonomically Correct Platen Adjust and Features:
- “Quick Lift” with CVL for easy probe to pad separation and alignment
- “Fine Adjust” for Probe card and variable Chucks and DUT thickness setup
- “Position Lock” allows for secure “lock” of user defined platen height setup
- “Thermal Isolation” maintains a safe temperature of probes and platen surface while chuck is at extreme temperatures (optional)
Platen “Fine Adjust” and “Position Lock”
Platen “Quick Lift”
- Local Enclosure
Signatone’s Local Enclosure is a high performance environmental chamber that provides an excellent EMI shielded and light-tight environment for low noise and low capacitance measurements.
Local Enclosure accommodates 4-port RF or 8-ports DC/Kelvin and connector panel or a combination of RF/DC.
The Signatone “Top Hat” provides for easy reconfiguration of Micro positioners, cables, connectors and additional customer defined fixtures allowing multiple setups while maintaining ease of use
| Local Enclosure Electrical Specifications | |
|---|---|
| EMI shielding | > 30 dB (typical) @ 1 kHz to 1 MHz |
| Light attenuation | ≥ 130 dB |
| Spectral noise floor | ≤ -180 dBVrms/rtHz (≤ 1 MHz |
| System AC noise | ≤ 5 mVp-p (≤ 1 GHz) |
Dc Probe –Selection Guide
| Coax Probe (C) | Triax Probe (T) | Kelvin Probe (K) | |
|---|---|---|---|
| Max voltage | 500 V | 500 V | 500 V |
| Temperature range | -60 °C to 300 °C | -60 °C to 300 °C | -60 °C to 300 °C |
| Leakage current | < 50fA | < 20fA | < 20fA |
| Connectivity | BNC | Standard Triax | SSMC |
| Connectivity type | Single Coaxial | Single low noise Triaxial | Force/Sense Coax |
| Characteristics impedance | 50 Ohms | 50 Ohms | 50 Ohms |
| Residual capacitance | < 80fF | < 80fF | < 80fF |
| Probe holder material | Brass | Brass | Brass |
| Probe tips material | Tungsten | Tungsten | Tungsten |
| Probe tips sizes | 0.5 µm – 25 µm | 0.5 µm – 25 µm | 0.5 µm – 25 µm |
| Minimum pad size | 25 µm x 25 µm | 25 µm x 25 µm | 25 µm x 25 µm |
Coax Probe
Triax Probe
Coax Kelvin Probe
*All leakage tests conducted in an enclosed environment with Keithley 4200, or equivalent, in sampling mode with 10 PLC, auto-ranging. 0.25s interval
- High Voltage/High Current PROBE –SELECTION GUIDE
| High Voltage Probes | High Current Probe | |||
|---|---|---|---|---|
| Model | HVP-CX-3 | HVP-TX-3 | HVP-CX-10 | HCP 100 |
| Max Voltage | 3 kV | 3 kV | 10 kV | 500 V |
| Max Current | 1 A DC/30 A Pulsed | 120 mA DC | 20 mA DC | 10 A DC/100 A Pulsed |
| Temperature Range | -60˚C to 300˚C | -60˚C to 300˚C | -60˚C to 300˚C | -60˚C to 300˚C |
| Leakage Current | < 200 pA @ 3 kV, < 5 pA @ 10 V | < 1 pA @ 3 kV, < 100 fA @ 10 V | < 100 pA @ 10 kV | N/A |
| Connector Type | SHV | HV Triax | UHV Coax | HV Banana |
| Replaceable Tip | Yes | Yes | Yes | Yes |
| Probe Material | W | W | W | BeCu or W |
Hvp-Cx-3
Hvp-Tx-3
Hvp-Cx-10
Hcp-100
Rf Probe –Selection Guide
| Cable Interface | |||||
|---|---|---|---|---|---|
| SP-40A | SP-50A | SP-67A | SP-110H | SP-145 | |
| Frequency | DC-40GHz | DC-50GHz | DC-67GHz | DC-110GHz | DC-145GHz |
| Connector | 2.92mm | 2.4mm | 1.85mm | 1.0mm | 0.8mm |
| Tip Configuration | GS/SG/GSG | GS/SG/GSG | GS/SG/GSG | GS/SG/GSG | GSG |
| Pitch Range | 50µ - 2540µ | 50µ - 1250µ | 50µ - 1250µ | 50µ - 1250µ | 50µ - 200µ |
| Insertion Loss | <.8db | <1.0db | <1.1db | <1.5db | <1.75db |
| Return Loss | > 18db | >18db | >14db | >15db | >15db |
| Calibration Substrates | ||||
|---|---|---|---|---|
| GSG | SP-CS-5 | SP-CS-9 | SP-CS-10 | SP-CS-18 |
| Pad Size | 50µ X 50µ | 100µ X 100µ | 150µ X 150µ | 300µ X 300µ |
| 100µ X 100µ | ||||
| 150µ X 150µ | ||||
| Pitch Range | 75µ - 250µ | 250µ - 600µ | 600µ - 1250µ | 1250µ - 2540µ |
| GS/SG | SP-CS-8 | SP-CS-14 | SP-CS-11 | SP-CS-17 |
| Pad Size | 50µ X 50µ | 100µ X 100µ | 150µ X 150µ | 300µ X 300µ |
| 100µ X 100µ | ||||
| 150µ X 150µ | ||||
| Pitch Range | 50µ - 200µ | 200µ - 400µ | 400µ - 1250µ | 750µ - 2540µ |
| GSG > 110GHz | SP-CS-15 | |||
| Pad Size | 25µ X 25µ | |||
| Pitch Range | 40µ - 150µ (SOLT) | |||
| 30µ - 150µ (LRM) |
| RF Cables | ||||
|---|---|---|---|---|
| RFC-40 | RFC-50 | RFC-67 | RFC-110 | |
| Frequency Range | DC - 40GHz | DC - 50GHz | DC - 67GHz | DC - 110GHz |
| Length | 4 Ft. | 4 Ft. | 3 Ft. | * |
| Connectors | 2.92 M – 2.92 F | 2.4 M – 2.4 F | 1.85 M - 1.85 F | 1.0 M - 1.0 F |
| * Contact Factory |
| Standard Wafer Chuck | |
|---|---|
| Connectivity | Coax BNC (m) |
| Diameter | 203 mm |
| Material | Nickel Plated Brass |
| Chuck surface | Zone selector knob with Peppered vacuum patterns |
| Vacuum hole pattern sections(diameter) | 22mm, 50mm, 91mm, 135mm, 168mm |
| Vacuum actuation | Selector Knob allows individual activation of vacuum zones |
| Supported DUT sizes | 25mm, 75mm, 100mm, 150mm, 200mm |
| Surface planarity | ±6.5µ |
| Rigidity | <3µ / 10N at edge of the chuck |
| Electrical Specification (Coax) | |
| Operation voltage | Designed for operation at -200V to + 200VDC |
| Maximum voltage between chuck top | 500 V DC |
| and GND | |
| Isolation | > 150 GΩ |
| Wafer Chuck (Triaxial) | |
| Connectivity | Triax (f) |
| Diameter | 203 mm |
| Material | Gold Plated Brass |
| Chuck surface | Independent Vacuum zones with vacuum rings |
| Vacuum hole pattern sections(diameter) | 0mm, 65mm, 112mm, 162mm |
| Vacuum actuation | Multi-Zone Adjustable Control |
| Supported DUT sizes | 3mm, 75mm, 125mm, 200mm |
| Surface planarity | ± 5 µm |
| Rigidity | <3µ / 10N near at edge of the chuck |
| Electrical Specification (Triax) | |
| Chuck isolation | Measured @ 10V DC |
| Force to guard | > 2 TΩ |
| Guard to shield | > 7 TΩ |
| Force to shield | > 15 TΩ |
Non-Thermal Chucks
| Auxiliary Chuck | |
|---|---|
| Quantity | 1-2 AUX chucks * |
| Position | Independently isolated (located on back left and right ) |
| Substrate Size (L x W) | Max 25mm x 25mm (1”x 1”) |
| Material | Ceramic, Ultem, or NI plated brass |
| Surface Planarity | ≤± 5 µm |
| Vacuum Control | Controlled independently, separate from wafer chucks |
| Typical Specifications of Signatone Thermal Technology | |||
|---|---|---|---|
| Nominal Description | 200mm Standard Hot | 200mm Hot/Cold Triax | 200mm Hot/Cold 3kV Triax |
| Temperature Range | +25 °C to +300 °C | -60 °C to +200 °C | -60 °C to +200 °C |
| Connectivity | Coax (m) | Triax (m) | SHV Triax (m) |
| Temperature control method | Liquid Cooled / Resistance heater | Liquid Cooled / Resistance heater | Liquid Cooled / Resistance heater |
| Coolant | Water | HFE | HFE |
| Smallest temperature selection step | 0.1 °C | 0.1 °C | 0.1 °C |
| Chuck temperature display resolution | 0.01 °C | 0.01 °C | 0.01 °C |
| External touchscreen display operation | Yes | Yes | Yes |
| Temperature stability | ±0.1 °C | ±0.1 °C | ±0.1 °C |
| Temperature accuracy | ±0.5 °C | ±0.5 °C | ±0.5 °C |
| Control method | Low noise DC/PID | Low noise DC/PID | Low noise DC/PID |
| Interfaces | RS232C | RS232C | RS232C |
| Optional Interfaces | GP-IB | GP-IB | GP-IB |
| Chuck surface plating | Nickel | Gold | Gold |
| Temperature sensor | RTD | RTD | RTD |
| Temperature uniformity | ±0.5 °C at ≤ 200 °C ±1.5 °C at > 200 °C | ±0.5 °C at ≤ 100 °C ±2.5 °C at 200 °C | ±0.5 °C at ≤ 100 °C ±3.5 °C at 200 °C |
| Surface flatness | < ±10 µm | < ±8 µm | < ±15µ |
| Electrical isolation - Coax BNC (m) | 150nA | > 5TΩ | > 5TΩ |
| Heating Rates | 25°C to 300°C < 12 min | 25°C to 200°C < 9 min | 25°C to 200°C < 28 min |
| Cooling Rates | 300°C to 25°C < 9min | 25 to -55°C < 24min | 25 to -55°C < 50min |
| Leakage @ 10 V Kelvin Triax (m) | N/A | <25fA | <400fA |
| Residual Capacitance | <200fF | <1pF | |
| Maximum voltage between chuck top and GND | 500V | 500V | 3kV |
| 3 Safety Circuits | Yes | Yes | Yes |
| Vacuum Pattern | Rings | Pin hole | Pin hole |
| Vacuum Zone (DUT Size) | 50, 100, 150, 200mm | 2, 50, 100, 150, 200 | 2, 50, 100, 150, 200 |
| Chiller electrical | TCII | FP89-HL 60Hz | FP89-HL 60Hz |
| Voltage | 110-120V A/C | 220-230V A/C | 220-230V A/C |
| Frequency | 60Hz | 60Hz | 60Hz |
| Peak Watts | 1000 | 2850 | 2850 |
| Chiller electrical | TCII-220 | FP89-HL 50Hz | FP89-HL 50Hz |
| Voltage | 215-240V A/C | 215-240V A/C | 215-240V A/C |
| Frequency | 50Hz | 50Hz | 50Hz |
| Peak Watts | 1000 | 3000 | 3000 |
| Thermal chuck controller, electrical | S1080A | S1080C | S1080C |
| Voltage | 208-240V A/C | 208-240V A/C | 208-240V A/C |
| Frequency | 50/60Hz | 50/60Hz | 50/60Hz |
| Peak Watts | 1400 | 1400 | 1400 |
Thermal System Facility Requirements
Power Requirements (Probe Station)
| Voltage / Watts | ||
|---|---|---|
| 115V 60Hz | 230V 50Hz | |
| General Probe System | 100W | 100W |
| Optical Accessories | 200W | 200W |
| M-VAC (vacuum pump) | 14W | 15W |
| Camera System (with Monitor) | 183W | 183W |
Standard Ers Thermal Chucks
| Specifications of ERS Technology 200mm Chucks | |||
| Temperature Range | -10 °C to 200 °C | -40 °C to 200 °C | -60 °C to 200 °C |
| Connectivity | Kelvin Triax (f) | Kelvin Triax (f) | Kelvin Triax (f) |
| Temperature control method | Cooling air / Resistance heater | Cooling air / Resistance heater | Cooling air / Resistance heater |
| Coolant | Air (user supplied) | Air (user supplied) | Air (user supplied) |
| Smallest temperature selection step | 0.1 °C | 0.1 °C | 0.1 °C |
| Chuck temperature display resolution | 0.01 °C | 0.01 °C | 0.01 °C |
| External touchscreen display operation | Yes | Yes | Yes |
| Temperature stability | ±0.08 °C | ±0.08 °C | ±0.08 °C |
| Temperature accuracy | 0.1 °C | 0.1 °C | 0.1 °C |
| Control method | Low noise DC/PID | Low noise DC/PID | Low noise DC/PID |
| Interfaces | RS232C | RS232C | RS232C |
| Chuck surface plating | Nickel plated with pinhole surface | Nickel plated with pinhole surface | Nickel plated with pinhole surface |
| Temperature sensor | Pt100 1/3DIN 4-line wired | Pt100 1/3DIN 4-line wired | Pt100 1/3DIN 4-line wired |
| Temperature uniformity | < ±0.5 °C at ≤ 200 °C | < ±0.5 °C at ≤ 200 °C | < ±0.5 °C at ≤ 200 °C |
| Surface flatness and base parallelism | < ±10 µm | < ±10 µm | < ±10 µm |
| Electrical isolation-Coax BNC (f) | N/A | N/A | N/A |
| Heating Rates | |||
| 25°C | -10 to 25 °C < 5 min | -40 to 25 °C < 8 min | -60 to 25 °C < 10 min |
| 200 °C | 25 to 200 °C < 15 min | ||
| Cooling Rates* | |||
| 200°C | 200 to 25 °C < 12 min | ||
| 25 °C | 25 to -10 °C < 12 min | 25 to -40 °C < 18 min | 25 to -60 °C < 25 min |
| Isolation | > 10 TΩ at 25 °C >2.5 TΩ at 200 °C >2.5 TΩ at -10 °C | > 10 TΩ at 25 °C > 2.5 TΩ at 200 °C > 2.5 TΩ at -40 °C | > 10 TΩ at 25 °C > 2.5 TΩ at 200 °C > 2.5 TΩ at -60 °C |
| Capacitance | N/A | N/A | N/A |
| Maximum voltage between chuck top and GND | 500 V DC | 500 V DC | 500 V DC |
*All data are relevant for chucks in ECO mode
| System Controller / Chiller Dimensions and Power / Air Consumption | ||||
|---|---|---|---|---|
| System type | W x D x H (mm) | Weight (kg) | Power cons. (VA) | max. Air flow (l/min) |
| 20 to 200 °C / 300 °C | 300 x 360 x 140 | 12 | 1000 | 200 |
| -10 to 200 °C / 300 °C | 420 x 355 x 450 | 50 | 1650 | 250 |
| -40 to 200 °C / 300 °C | 420 x 500 x 1020 | 140 | 2400 | 400 |
| -60 to 200 °C / 300 °C | 420 x 500 x 1020 | 140 | 2400 | 400 |
| Dimensions (L x D x H) | 660 x 840 x 787mm (26” x 33” x 31”) |
|---|---|
| Weight | 140.6kg (310 lbs.) |
WL- 210-LE / including microscope* (Not including Table)
* Can very dependent on monitor, probes, shelf, and microscope selection
System Dimensions – Table Optional
Warranty
- Standard Warranty 12 months *
- For Extended Warranty and Service Contracts: Contact Signatone Corp. for more information
* See Signatone Corporate Terms and Conditions of Sale for further details.
- North America: Sales.NA@signatone.com
- Europe: Sales.Europe@signatone.com
- Asia: Sales.Asia@signatone.com
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