Signatone WL - 250 200 mm Semi-Automatic Probe System
For reliable and accurate RF-mmW-THz, DC/CV, and High Power Test Measurements
Designed for a Variety of On-Wafer Analytical
and Semi-Production Applications
- RF applications up to 110GHz 2 & 4 port setup
- mmW 110GHz -1.5THz 2-Port
- DC, CV/IV, pulsed –IV applications
- High Power Application up to 12KV /600A
- IC Design / test verification Ambient, +300°C
- -60 °C to +300 °C when use with Local Enclosure EMI / RFI / Light-Tight Shielding (optional).
Product Versatility
- Designed for full or partial wafer probing
- Roll-Out stage for ease of wafer loading
- Active Vibration Isolation table (optional)
- Ambient, Hot (+300°C) and Hot /Cold
(-60 °C to +300 °C) configurations
Options and Configurations
- Standard Platen Supports up to 4x RF + 4x DC, 2-mmW+2RF or DC, or 10x DC MicroPositioner and/or 4.5” wide probe card
- Available in multiple configurations including a variety of chuck options, DC/RF/High Power positioners, Computer Aided Probes, microscopes, camera’s, Dark Box’s, lasers for various applications
Features / Benefits
Roll - Out Stage
- Roll-Out Stage designed for easy Loading and Unloading of Wafer Samples and single ICs
- Excellent for use with probe cards and multi probe/complex setups
- Allows easy access to AUX -chucks
- Lock and Un-Lock position indicator
- Presentation 190mm / 95%
- Easy access to vacuum-zone selector knob
- Simplifies use with Local Enclosure option
Specifications
| Chuck XY Stage (Programmable) | |||
|---|---|---|---|
| Travel range | 205 mm x 205 mm (8.07 x 8.07 in) | ||
| Resolution | 0.5 μm | ||
| Accuracy | ± 2.0 μm* | ||
| XY stage drive | Closed-loop high precision servo motor PID control | ||
| Speed | Variable Speed XY chuck stage control | ||
| Max. movement speed | 120 mm / sec. | ||
| Chuck Z Stage (Programmable) | |||
| Travel range | 12.5 mm (0.5 in) | ||
| Resolution | 0.25 μm | ||
| Accuracy | ± 2.0 μm | ||
| Repeatability | ± 1.0 μm | ||
| Z stage drive | Closed-loop micro stepper motor | ||
| Speed | Variable Mode and Speed selection | ||
| Max. movement speed | 15 mm / sec. | ||
| Chuck Theta Stage (Programmable) | |||
| Travel range | ± 7.5° (15°) | ||
| Resolution | 0.000035° | ||
| Accuracy | < 1.0 μm (measured at the edge of the 200 mm chuck) | ||
| Repeatability | < 1.5 μm | ||
| Theta stage drive | High resolution stepper motor, rotary encoder feedback system | ||
| Roll Out / Loading Stage | |||
| Travel range | 195mm | ||
| Presentation | 190mm | ||
| Return repeatability | < 1μm | ||
| Motorized Microscope Stage (linear) | |||
| Movement range | 50mm X 50mm (2”x2”) | ||
| Resolution | 0.02µm (20 Nano meters) | ||
| Scope lift | 101 mm (4”) Vertical Pneumatic (Motorized- optional) | ||
| Scope lift motorized (optional) | 50mm motorized + 50 mm pneumatic / combination = 101mm (4”) |
*All data relevant for use with Precision package
| Specifications | |
|---|---|
| Material | Nickel Plated Steel (Al optional) |
| Dimension | L = 580mm x W = 637mm x H = 12.7mm (See drawing) |
| Chuck to Thermal Shield Separation | Min. 2 mm (Variable Separation with Fine Platen Adjust) |
| Max. No of Micro Positioners | 4x RF + 2x DC or 2x RF + 4 x DC or 4x RF + 4x DC or 10x DC |
| Quick Platen Lift Control (CVL) | Continuous Variable Lift (0 to 3.175 mm) |
| Contact Repeatability | < 1 µm (0.04 mils) by Manual Control |
| RF MicroPositioner mounting | Magnetic or Bolt Down |
| DC MicroPositioner mounting | Magnetic or Vacuum |
| Thermal Isolation (Optional) | Platen Temp = +15 °C to +40°C /chuck @ -60 °C to +300°C |
Probe Platen
Sample 1: Probe Configured with 4 RF + 2 DC Probes
Sample 2: Probe Configured with 2 RF + 4 DC Probes
Sample 3: Probe Configured with 4RF + 4 DC Probes
Sample 4: Probe Configured with 10 DC Probes
Large Area Positioner w/ Frequency Extender
Sample 5: 2x mmW + 2 RF probes
- ONE PLATEN x 4 BENFITS
Signatone Multi Benefit Ergonomically Correct Platen Adjust and Features:
- “Quick Lift” with CVL for easy probe to pad separation and alignment
- “Fine Adjust” for Probe card and variable Chucks and DUT thickness setup
- “Position Lock” allows for secure “lock” of user defined platen height setup
- “Thermal Isolation” maintains a safe temperature of probes and platen surface while chuck is at extreme temperatures (optional)
Platen “Fine Adjust” and “Position Lock”
Platen “Quick Lift”
Dc Probe –Selection Guide
| Coax Probe (C) | Triax Probe (T) | Kelvin Probe (K) | |
|---|---|---|---|
| Max voltage | 500 V | 500 V | 500 V |
| Temperature range | -60 °C to 300 °C | -60 °C to 300 °C | -60 °C to 300 °C |
| Leakage current | < 50fA | < 20fA | < 20fA |
| Connectivity | BNC | Standard Triax | SSMC |
| Connectivity type | Single Coaxial | Single low noise Triaxial | Force/Sense Coax |
| Characteristics impedance | 50 Ohms | 50 Ohms | 50 Ohms |
| Residual capacitance | < 80fF | < 80fF | < 80fF |
| Probe holder material | Brass | Brass | Brass |
| Probe tips material | Tungsten | Tungsten | Tungsten |
| Probe tips sizes | 0.5 µm – 25 µm | 0.5 µm – 25 µm | 0.5 µm – 25 µm |
| Minimum pad size | 25 µm x 25 µm | 25 µm x 25 µm | 25 µm x 25 µm |
Coax Probe
Triax Probe
Coax Kelvin Probe
*All leakage tests conducted in an enclosed environment with Keithley 4200, or equivalent, in sampling mode with 10 PLC, auto-ranging. 0.25s interval
- High Voltage/High Current PROBE –SELECTION GUIDE
| High Voltage Probes | High Current Probe | |||
|---|---|---|---|---|
| Model | HVP-CX-3 | HVP-TX-3 | HVP-CX-10 | HCP 100 |
| Max Voltage | 3 kV | 3 kV | 10 kV | 500 V |
| Max Current | 1 A DC/30 A Pulsed | 120 mA DC | 20 mA DC | 10 A DC/100 A Pulsed |
| Temperature Range | -60˚C to 300˚C | -60˚C to 300˚C | -60˚C to 300˚C | -60˚C to 300˚C |
| Leakage Current | < 200 pA @ 3 kV, < 5 pA @ 10 V | < 1 pA @ 3 kV, < 100 fA @ 10 V | < 100 pA @ 10 kV | N/A |
| Connector Type | SHV | HV Triax | UHV Coax | HV Banana |
| Replaceable Tip | Yes | Yes | Yes | Yes |
| Probe Material | W | W | W | BeCu or W |
Hvp-Cx-3
Hvp-Tx-3
Hvp-Cx-10
Hcp-100
Rf Probe –Selection Guide
| Cable Interface | |||||
|---|---|---|---|---|---|
| SP-40A | SP-50A | SP-67A | SP-110H | SP-145 | |
| Frequency | DC-40GHz | DC-50GHz | DC-67GHz | DC-110GHz | DC-145GHz |
| Connector | 2.92mm | 2.4mm | 1.85mm | 1.0mm | 0.8mm |
| Tip Configuration | GS/SG/GSG | GS/SG/GSG | GS/SG/GSG | GS/SG/GSG | GSG |
| Pitch Range | 50µ - 2540µ | 50µ - 1250µ | 50µ - 1250µ | 50µ - 1250µ | 50µ - 200µ |
| Insertion Loss | <.8db | <1.0db | <1.1db | <1.5db | <1.75db |
| Return Loss | > 18db | >18db | >14db | >15db | >15db |
| Calibration Substrates | ||||
|---|---|---|---|---|
| GSG | SP-CS-5 | SP-CS-9 | SP-CS-10 | SP-CS-18 |
| Pad Size | 50µ X 50µ | 100µ X 100µ | 150µ X 150µ | 300µ X 300µ |
| 100µ X 100µ | ||||
| 150µ X 150µ | ||||
| Pitch Range | 75µ - 250µ | 250µ - 600µ | 600µ - 1250µ | 1250µ - 2540µ |
| GS/SG | SP-CS-8 | SP-CS-14 | SP-CS-11 | SP-CS-17 |
| Pad Size | 50µ X 50µ | 100µ X 100µ | 150µ X 150µ | 300µ X 300µ |
| 100µ X 100µ | ||||
| 150µ X 150µ | ||||
| Pitch Range | 50µ - 200µ | 200µ - 400µ | 400µ - 1250µ | 750µ - 2540µ |
| GSG > 110GHz | SP-CS-15 | |||
| Pad Size | 25µ X 25µ | |||
| Pitch Range | 40µ - 150µ (SOLT) | |||
| 30µ - 150µ (LRM) |
| RF Cables | ||||
|---|---|---|---|---|
| RFC-40 | RFC-50 | RFC-67 | RFC-110 | |
| Frequency Range | DC - 40GHz | DC - 50GHz | DC - 67GHz | DC - 110GHz |
| Length | 4 Ft. | 4 Ft. | 3 Ft. | * |
| Connectors | 2.92 M – 2.92 F | 2.4 M – 2.4 F | 1.85 M - 1.85 F | 1.0 M - 1.0 F |
| * Contact Factory |
System Controls
The S1080 thermal chuck controller features touch screen commands, triple safety circuits, and 0.1° resolution.
ProbeMaster software features thermal control from the probe station.
Hardware accessories including keyboards and mouse can be easily integrated into the table’s instrumentation rack providing greater ease of use, ergonomics, and minimizing the overall system dimensions.
System and thermal controllers may also be integrated.
Industry proven precision Joy Stick/ thumbwheel combination, intuitive selector panel for DUT, Microscope, and 1-4 Computer Aided Probes (CAP).
LED indicator for active device, Multi-speed thumbwheels offer sub-micron positioning.
Signatone’s powerful navigation software ProbeMaster drives all Signatone semiautomatic probing systems.
ProbeMaster simplifies navigation to a test site by using arrow keys, wafer graph or point and shoot on the live image. The optional vision control module includes auto align, auto start, probe exact, and sure touch features.
Supports many popular interface protocols * see supported software platforms
System Software
Go to HOME Location
Wafer “Load / Un-Load”
Move or Step
Direction Keys
Device Selector
Indicates Wafer, Scope, Probe 1-4
Joystick Status
Sw Abort
Wafer Map
Programmed Points, Reports X-Y Position - Row/Colum.
Click and Move to Die Location, Color Map..
Program Points Program Sub-Sites
On-Screen Live Image Allows Image Capture and “Point –Shoot” navigation of Selected Device
Thermal Chuck
Control Software
0.1° resolution /
RS-232 interface
| Standard Wafer Chuck | |
|---|---|
| Connectivity | Coax BNC (m) |
| Diameter | 203 mm |
| Material | Nickel Plated Brass (gold optional) |
| Chuck surface | Zone selector knob with Peppered vacuum patterns |
| Vacuum hole pattern sections(diameter) | 22mm, 50mm, 91mm, 135mm, 168mm |
| Vacuum actuation | Selector Knob allows individual activation of vacuum zones |
| Supported DUT sizes | 25mm, 75mm, 100mm, 150mm, 200mm |
| Surface planarity | ±6.5µ |
| Rigidity | <3µ / 10N at edge of the chuck |
| Electrical Specification (Coax) | |
| Operation voltage | Designed for operation at -200V to + 200VDC |
| Maximum voltage between chuck top | 500 V DC |
| and GND | |
| Isolation | > 150 GΩ |
| Wafer Chuck (Triaxial) | |
| Connectivity | Triax (m) |
| Diameter | 203 mm |
| Material | Gold Plated Brass |
| Chuck surface | Independent Vacuum zones with vacuum rings |
| Vacuum hole pattern sections(diameter) | 0mm, 65mm, 112mm, 162mm |
| Vacuum actuation | Multi-Zone Adjustable Control |
| Supported DUT sizes | 3mm, 75mm, 125mm, 200mm |
| Surface planarity | ± 5 µm |
| Rigidity | <3µ / 10N near at edge of the chuck |
| Electrical Specification (Triax) | |
| Chuck isolation | Measured @ 10V DC |
| Force to guard | > 2 TΩ |
| Guard to shield | > 7 TΩ |
| Force to shield | > 15 TΩ |
Non-Thermal Chucks
| Auxiliary Chuck | |
|---|---|
| Quantity | 2 AUX chucks |
| Position | Independently isolated (located on back left and right ) |
| Substrate Size (L x W) | Max 25mm x 25mm (1”x 1”) |
| Material | Ceramic, Ultem, or NI plated brass |
| Surface Planarity | ≤± 5 µm |
| Vacuum Control | Controlled independently, separate from wafer chucks |
Signatone Thermal Chucks
| Typical Specifications of Signatone Thermal Technology | |||
|---|---|---|---|
| 200mm Standard Hot | 200mm Hot/ Triax | 200mm Hot/ 3kV Triax | |
| Temperature Range | +25 °C to +300 °C | +25 °C to +200 °C | +25 °C to +200 °C |
| Connectivity | Coax (m) | Triax (m) | SHV Triax (m) |
| Temperature control method | Liquid Cooled / Resistance heater | Liquid Cooled / Resistance heater | Liquid Cooled / Resistance heater |
| Coolant | Water | Water | Water |
| Smallest temperature selection step | 0.1 °C | 0.1 °C | 0.1 °C |
| Chuck temperature display resolution | 0.01 °C | 0.01 °C | 0.01 °C |
| External touchscreen display operation | Yes | Yes | Yes |
| Temperature stability | ±0.1 °C | ±0.1 °C | ±0.1 °C |
| Temperature accuracy | ±0.5 °C | ±0.5 °C | ±0.5 °C |
| Control method | Low noise DC/PID | Low noise DC/PID | Low noise DC/PID |
| Interfaces | RS232C | RS232C | RS232C |
| Optional Interfaces | GP-IB | GP-IB | GP-IB |
| Chuck surface plating | Nickel | Gold | Gold |
| Temperature sensor | RTD | RTD | RTD |
| Temperature uniformity | ±0.5 °C at ≤ 200 °C ±1.5 °C at > 200 °C | ±0.5 °C at ≤ 100 °C ±2.5 °C at 200 °C | ±0.5 °C at ≤ 100 °C ±3.5 °C at 200 °C |
| Surface flatness | < ±10 µm | < ±8 µm | < ±15µ |
| Electrical isolation - Coax BNC (m) / SHV Triax | 150nA | > 5TΩ | > 5TΩ |
| Heating Rates | 25°C to 300°C < 12 min | 25°C to 200°C < 9 min | 25°C to 200°C < 28 min |
| Cooling Rates | 300°C to 25°C < 9min | 200°C to 25°C < 8min | 200°C to 25°C < 8min |
| Leakage @ 10 V Kelvin Triax | N/A | <25fA | <400fA |
| Residual Capacitance | <200fF | <1pF | |
| Maximum voltage between chuck top and GND | 500V | 500V | 3kV |
| 3 Safety Circuits | Yes | Yes | Yes |
| Vacuum Pattern | Rings | Pin hole | Pin hole |
| Vacuum Zone (DUT Size) | 50, 100, 150, 200mm | 2, 50, 100, 150, 200mm | 2, 50, 100, 150, 200mm |
| System Controller / Dimensions /Weight / Power Consumption | ||||
|---|---|---|---|---|
| System Model | W x D x H (mm) | Weight (kg) | Weight (Lbs.) | Power cons. (VA) |
| S-1080 | 432 x 483 x 267 | 20.4 | 45 | 2000 |
| TC-II | 355 x 711 x 610 | 50.8 | 112 | 1500 |
| 2XRC-89HL | 559 x 610 x 915 | 135 | 297 | 3700 |
| Specifications of ERS/ SIGNATONE Technology HV 200mm Chucks | ||
| Temperature Range | 25 °C to 200 °C | 25 °C to 300 °C |
| Connectivity | Kelvin Triax (M),3kV or 10 kV Coaxial | Kelvin Triax (M),3kV or 10 kV Coaxial |
| Temperature control method | Cooling air / Resistance heater | Cooling air / Resistance heater |
| Coolant | Air (user supplied) | Air (user supplied) |
| Smallest temperature selection step | 0.1 °C | 0.1 °C |
| Chuck temperature display resolution | 0.01 °C | 0.01 °C |
| External touchscreen display (optional) | Yes | Yes |
| Temperature stability | ±0.08 °C | ±0.08 °C |
| Temperature accuracy | ±0.1 °C | ±0.1 °C |
| Control method | Low noise DC/PID | Low noise DC/PID |
| Interfaces | RS232C | RS232C |
| Chuck surface plating | Gold plated with pinhole surface | Gold plated with pinhole surface |
| Temperature sensor | Pt100 1/3DIN 4-line wired | Pt100 1/3DIN 4-line wired |
| Temperature uniformity | < ±0.5 °C at ≤ 200 °C | < ±0.5 °C at ≤ 300 °C |
| Surface flatness and base parallelism | < ±10 µm | < ±10 µm |
| Heating and Cooling Rates* | 25 to 200°C <30min 200 to 25°C <30min | 25 to 300°C <35min 300 to 25°C <35min |
| Leakage @ 3000V Kelvin Triax (M) | ||
| 25°C | 5pA | 5pA |
| 200 °C | 10pA | 10pA |
| 300°C | -- | 15pA |
| Leakage @ 10kV Coax UHV/SHV (M) | ||
| 25°C | 6nA | 6nA |
| 200 °C | 6nA | 6nA |
| 300°C | -- | 6nA |
| Maximum voltage between chuck top and GND | 10 kV DC | 10 kV DC |
Ers High Power Thermal Chucks
*All data are relevant for chucks in ECO mode
| System Controller / Chiller Dimensions and Power / Air Consumption | ||||
|---|---|---|---|---|
| System type | W x D x H (mm) | Weight (kg) | Power cons. (VA) | max. Air flow (l/min) |
| 25 to 200 °C | 300 x 360 x 135 | 12 | 1300 | 220 |
| 25 to 300 °C | 300 x 360 x 135 | 12 | 1300 | 220 |
System Dimensions Including Table
| Dimensions (L x D x H) | 863x 1085 x 1538 mm (34 x 42.7 x 60.6 In ) |
|---|---|
| Weight | 450 kg (995 lbs.) |
WL-250 / Vibration Isolation Table /Monitor and Keyboard Mount
* Can very dependent on monitor, keyboard (roll out drawer) position and Microscope selection
| Dimensions (L x D x H) | 936 x 1085 x 1820 mm (36.85 x 42.7 x 71.7 In ) |
|---|---|
| Weight | 510 kg (1125 lbs.) |
WL-250/PSDB/Vibration Isolation Table/Monitor and Keyboard Mount
* Can very dependent on monitor, keyboard, and dark-box door position
System Dimensions Including Dark Box
Warranty
* See Signatone Corporate Terms and Conditions of Sale for further details.
- Standard Warranty 12 months *
- For Extended Warranty and Service Contracts : Contact Signatone Corp. for more information
- North America: Sales.NA@signatone.com
- Europe: Sales.Europe@signatone.com
- Asia: Sales.Asia@signatone.com
Request a quote
Configure this system with our engineers — factory‑direct from Gilroy, California.