“Best Test” Solutions
www.signatone.com
Data Sheet · RF / mmW Probe Systems
Signatone WL-310 300 mm Manual Probe System
for reliable and accurate DC/CV, RF and mmW measurements
Features / Benefits
Designed for a Variety of On-Wafer Analytical
Measurement Applications
- RF applications up to 110GHz 2 & 4 port setup
- mmW 110GHz -1.5THz 2-Port
- DC, CV/IV, pulsed –IV applications
- High Power Application up to 12KV /600A
- IC Design / test verification Ambient, +300°C
Product Versatility
- Designed for full or partial wafer probing
- Roll-Out stage for ease of wafer loading
- Active Vibration Isolation table (optional)
- Hot Chuck System +300°C (optional)
Options and Configurations
- Standard Platen Supports up to 4x RF + 4x DC, 2-mmW+2RF or DC, or 10x DC MicroPositioner and/or 4.5” wide probe card
- Available in multiple configurations including a variety of chuck options, DC/RF/High Power positioners, Computer Aided Probes, microscopes, camera’s, Dark Box’s, lasers for various applications
Roll - Out Stage
- Roll-Out Stage designed for easy Loading and Unloading of Wafer Samples and single ICs
- Excellent for use with probe cards and multi probe/complex setups
- Allows easy access to AUX -chucks
- Lock and Un-Lock position indicator
- Presentation 190mm / 95%
- Easy access to vacuum-zone selector knob
| Chuck XY Stage (Manual) | |||
|---|---|---|---|
| Travel range | 305 mm x 305 mm (12 x 12 in) | ||
| Travel Resolution (standard) | 14 μm Per Degree of Knob Rotation | ||
| Travel Resolution (Fine) | 1.5 μm Per Degree of Knob Rotation | ||
| Drive Mechanism | Precision Leadscrew – Carriage and Rails | ||
| Chuck Z Stage (Pneumatic) | |||
| Travel range | 2.5 mm (0.01 in) | ||
| Repeatability | ± 1.0 μm | ||
| Z Stage Drive | Pneumatic Precision Lift | ||
| Chuck To Platen (Manual Adjust) | |||
| Separation (Quick Lift) | 3.175mm (1/8”) | ||
| Separation (Fine Lift) | 38.1mm (1.5”) | ||
| Chuck Theta Stage (Manual) | |||
| Travel range | ± 11° (22°) | ||
| Resolution | 0.01mm Per Degree of Knob Rotation | ||
| Accuracy | < 1.0 μm (measured at the edge of the 300 mm chuck) | ||
| Repeatability | < 1.5 μm | ||
| Theta Stage Drive | High Resolution Micrometer | ||
| Roll Out / Loading Stage | |||
| Travel range | 285mm | ||
| Presentation | 95% | ||
| Return repeatability | < 1μm | ||
| Manual Microscope Stage (linear) | |||
| Movement range | 50mm X 50mm (2”x2”) | ||
| Resolution | < 2µm (2 x 10-4 mils) | ||
| Scope lift | 101 mm (4”) Vertical Pneumatic (Manual Knob- optional) |
Specifications
Probe Platen
| Specifications | |
|---|---|
| Material | Nickel Plated Steel (Al optional) |
| Dimension | L = 580mm x W = 637mm x H = 12.7mm (See drawing) |
| Max. No of Micro Positioners | 8x DC or 4x DC + 2x RF or 2x DC + 4x RF or 4x DC + 4x RF |
| Quick Platen Lift Control (CVL) | Continuous Variable Lift (0 to 3.175 mm) |
| Contact Repeatability | < 1 µm (0.04 mils) by Manual Control |
| RF MicroPositioner mounting | Magnetic or Bolt Down |
| DC MicroPositioner mounting | Magnetic or Vacuum |
Universal Platen Designed for Multiple Probe Configurations
Sample Probe Configured with 4 RF + 4 DC Probes in Local Enclosure
- ONE PLATEN x 4 BENFITS
Signatone Multi Benefit Ergonomically Correct Platen Adjust and Features:
- “Quick Lift” with CVL for easy probe to pad separation and alignment
- “Fine Adjust” for Probe card and variable Chucks and DUT thickness setup
- “Position Lock” allows for secure “lock” of user defined platen height setup
- “Thermal Isolation” maintains a safe temperature of probes and platen surface while chuck is at extreme temperatures (optional)
Platen “Fine Adjust” and “Position Lock”
Platen “Quick Lift”
Dc Probe –Selection Guide
| Coax Probe (C) | Triax Probe (T) | Kelvin Probe (K) | |
|---|---|---|---|
| Max voltage | 500 V | 500 V | 500 V |
| Temperature range | -60 °C to 300 °C | -60 °C to 300 °C | -60 °C to 300 °C |
| Leakage current | < 50fA | < 20fA | < 20fA |
| Connectivity | BNC | Standard Triax | SSMC |
| Connectivity type | Single Coaxial | Single low noise Triaxial | Force/Sense Coax |
| Characteristics impedance | 50 Ohms | 50 Ohms | 50 Ohms |
| Residual capacitance | < 80fF | < 80fF | < 80fF |
| Probe holder material | Brass | Brass | Brass |
| Probe tips material | Tungsten | Tungsten | Tungsten |
| Probe tips sizes | 0.5 µm – 25 µm | 0.5 µm – 25 µm | 0.5 µm – 25 µm |
| Minimum pad size | 25 µm x 25 µm | 25 µm x 25 µm | 25 µm x 25 µm |
Coax Probe
Triax Probe
Coax Kelvin Probe
*All leakage tests conducted in an enclosed environment with Keithley 4200, or equivalent, in sampling mode with 10 PLC, auto-ranging. 0.25s interval
Rf Probe –Selection Guide
| Cable Interface | |||||
|---|---|---|---|---|---|
| SP-40A | SP-50A | SP-67A | SP-110H | SP-145 | |
| Frequency | DC-40GHz | DC-50GHz | DC-67GHz | DC-110GHz | DC-145GHz |
| Connector | 2.92mm | 2.4mm | 1.85mm | 1.0mm | 0.8mm |
| Tip Configuration | GS/SG/GSG | GS/SG/GSG | GS/SG/GSG | GS/SG/GSG | GSG |
| Pitch Range | 50µ - 2540µ | 50µ - 1250µ | 50µ - 1250µ | 50µ - 1250µ | 50µ - 200µ |
| Insertion Loss | <.8db | <1.0db | <1.1db | <1.5db | <1.75db |
| Return Loss | > 18db | >18db | >14db | >15db | >15db |
| Calibration Substrates | ||||
|---|---|---|---|---|
| GSG | SP-CS-5 | SP-CS-9 | SP-CS-10 | SP-CS-18 |
| Pad Size | 50µ X 50µ | 100µ X 100µ | 150µ X 150µ | 300µ X 300µ |
| 100µ X 100µ | ||||
| 150µ X 150µ | ||||
| Pitch Range | 75µ - 250µ | 250µ - 600µ | 600µ - 1250µ | 1250µ - 2540µ |
| GS/SG | SP-CS-8 | SP-CS-14 | SP-CS-11 | SP-CS-17 |
| Pad Size | 50µ X 50µ | 100µ X 100µ | 150µ X 150µ | 300µ X 300µ |
| 100µ X 100µ | ||||
| 150µ X 150µ | ||||
| Pitch Range | 50µ - 200µ | 200µ - 400µ | 400µ - 1250µ | 750µ - 2540µ |
| GSG > 110GHz | SP-CS-15 | |||
| Pad Size | 25µ X 25µ | |||
| Pitch Range | 40µ - 150µ (SOLT) | |||
| 30µ - 150µ (LRM) |
| RF Cables | ||||
|---|---|---|---|---|
| RFC-40 | RFC-50 | RFC-67 | RFC-110 | |
| Frequency Range | DC - 40GHz | DC - 50GHz | DC - 67GHz | DC - 110GHz |
| Length | 4 Ft. | 4 Ft. | 3 Ft. | * |
| Connectors | 2.92 M – 2.92 F | 2.4 M – 2.4 F | 1.85 M - 1.85 F | 1.0 M - 1.0 F |
| * Contact Factory |
| Standard Wafer Chuck | |
|---|---|
| Connectivity | Coax BNC (m) |
| Diameter | 308 mm |
| Material | Nickel Plated Brass (gold optional) |
| Chuck surface | Zone selector knob with Peppered vacuum patterns |
| Vacuum hole pattern sections(diameter) | 22mm, 50mm, 91mm, 135mm, 168mm, 265mm |
| Vacuum actuation | Selector Knob allows individual activation of vacuum zones |
| Supported DUT sizes | 25mm, 75mm, 100mm, 150mm, 200mm, 300mm |
| Surface planarity | ±6.5µ |
| Rigidity | <3µ / 10N at edge of the chuck |
| Electrical Specification (Coax) | |
| Operation voltage | Designed for operation at -200V to + 200VDC |
| Maximum voltage between chuck top | 500 V DC |
| and GND | |
| Isolation | > 150 GΩ |
| Wafer Chuck (Triaxial) | |
| Connectivity | Triax (m) |
| Diameter | 308 mm |
| Material | Gold Plated Brass |
| Chuck surface | Independent Vacuum zones with vacuum rings |
| Vacuum hole pattern sections(diameter) | 0mm, 65mm, 112mm, 162mm, 265mm |
| Vacuum actuation | Multi-Zone Adjustable Control |
| Supported DUT sizes | 3mm, 75mm, 125mm, 200mm, 300mm |
| Surface planarity | ± 5 µm |
| Rigidity | <3µ / 10N near at edge of the chuck |
| Electrical Specification (Triax) | |
| Chuck isolation | Measured @ 10V DC |
| Force to guard | > 2 TΩ |
| Guard to shield | > 7 TΩ |
| Force to shield | > 15 TΩ |
Non-Thermal Chucks
Signatone Thermal Chucks
| Typical Specifications of Signatone Thermal Technology | |||
|---|---|---|---|
| 300mm Standard Hot | 300mm Hot/ Triax | 300mm Hot/ 3kV Triax | |
| Temperature Range | +25 °C to +300 °C | +25 °C to +200 °C | +25 °C to +200 °C |
| Connectivity | Coax (m) | Triax (m) | HV Triax (m) |
| Temperature control method | Liquid Cooled / Resistance heater | Liquid Cooled / Resistance heater | Liquid Cooled / Resistance heater |
| Coolant | Water | Water | Water |
| Smallest temperature selection step | 0.1 °C | 0.1 °C | 0.1 °C |
| Chuck temperature display resolution | 0.01 °C | 0.01 °C | 0.01 °C |
| External touchscreen display operation | Yes | Yes | Yes |
| Temperature stability | ±0.1 °C | ±0.1 °C | ±0.1 °C |
| Temperature accuracy | ±0.5 °C | ±0.5 °C | ±0.5 °C |
| Control method | Low noise DC/PID | Low noise DC/PID | Low noise DC/PID |
| Interfaces | RS232C & TCP/TCIP | RS232C & TCP/TCIP | RS232C & TCP/TCIP |
| Optional Interfaces | GP-IB | GP-IB | GP-IB |
| Chuck surface plating | Nickel | Gold | Gold |
| Temperature sensor | RTD | RTD | RTD |
| Temperature uniformity | ±0.5 °C at ≤ 200 °C ±1.5 °C at > 200 °C | ±0.5 °C at ≤ 100 °C ±2.5 °C at 200 °C | ±0.5 °C at ≤ 100 °C ±3.5 °C at 200 °C |
| Surface flatness | < ±10 µm | < ±8 µm | < ±15µ |
| Electrical isolation - Coax BNC (m) / SHV Triax | 150nA | > 5TΩ | > 5TΩ |
| Heating Rates | 25°C to 300°C < 12 min | 25°C to 200°C < 9 min | 25°C to 200°C < 28 min |
| Cooling Rates | 300°C to 25°C < 9min | 200°C to 25°C < 8min | 200°C to 25°C < 8min |
| Leakage @ 10 V Kelvin Triax | N/A | <25fA | <400fA |
| Residual Capacitance | <200fF | <1pF | |
| Maximum voltage between chuck top and GND | 500V | 500V | 3kV |
| 3 Safety Circuits | Yes | Yes | Yes |
| Vacuum Pattern | Rings | Pin hole | Pin hole |
| Vacuum Zone (DUT Size) | 50, 100, 150, 200,300mm | 2, 50, 100, 150, 200,300mm | 2,50, 100, 150, 200, 300mm |
| System Controller / Dimensions /Weight / Power Consumption | ||||
|---|---|---|---|---|
| System Model | W x D x H (mm) | Weight (kg) | Weight (Lbs.) | Power cons. (VA) |
| S-1080 | 558 x 483 x 178 | 20.4 | 45 | 2000 |
| Chiller | 355 x 711 x 610 | 50.8 | 112 | 1500 |
| Auxiliary Chuck | |
|---|---|
| Quantity | 1-2 AUX chucks * |
| Position | Independently isolated (located on back left and right ) |
| Substrate Size (L x W) | Max 25mm x 25mm (1”x 1”) |
| Material | Ceramic, Ultem, or NI plated brass |
| Surface Planarity | ≤± 5 µm |
| Vacuum Control | Controlled independently, separate from wafer chucks |
System Dimensions Including Table
| Dimensions (L x D x H) | 1093x 1085 x 1700 mm (43 x 42.7 x 66.9 In ) |
|---|---|
| Weight | 635 kg (1400 lbs.) |
WL-350 / Vibration Isolation Table /Monitor
* Can very dependent on monitor, keyboard (roll out drawer) position and Microscope selection
Warranty
- Standard Warranty 12 months *
- For Extended Warranty and Service Contracts : Contact Signatone Corp. for more information
* See Signatone Corporate Terms and Conditions of Sale for further details.
- North America: Sales.NA@signatone.com
- Europe: Sales.Europe@signatone.com
- Asia: Sales.Asia@signatone.com
Request a quote
Configure this system with our engineers — factory‑direct from Gilroy, California.