Signatone WL-350-LE 300mm Semi-Automatic Probe System with Local Enclosure for Reliable and Accurate RF, DC/CV, Test Measurements
Designed for a Variety of On-Wafer Analytical
and Semi-Production Applications
- RF applications 2 & 4 port setup
- DC, CV/IV, pulsed –IV applications
- IC Design / test verification Ambient, +300°C
- -60 °C to +300 °C when use with Local Enclosure EMI / RFI / Light-Tight Shielding
Product Versatility
- Designed for full or partial wafer probing
- Roll-Out stage for ease of wafer loading
- Active Vibration Isolation table (optional)
Options and Configurations
- Local Enclosure Supports 4x RF + 2x DC or
8x DC MicroPositioner / 4.5” wide probe card
- Available in multiple configurations including
a variety of chuck options, DC/RF/High Power positioners, Computer Aided Probes, microscopes, camera’s ,…
Features / Benefits
Local Enclosure for Accurate Measurements
- Designed for advanced EMI / RFI /
Light-Tight Shielding.
- FemtoAmp low-leakage abilities
Roll - Out Stage
- Roll-Out Stage designed for easy Loading and Unloading of Wafer Samples and single ICs
- Excellent for use with probe cards and multi probe/complex setups
- Allows easy access to AUX -chucks
- Lock and Un-Lock position indicator
- Presentation 285mm / 95%
- Lock / Unlock indicators
- Simplifies use with Local Enclosure option
Specifications
| Chuck XY Stage (Programmable) | |||
|---|---|---|---|
| Travel range | 308 mm x 308 mm (12.126 x 12.126 in) | ||
| Resolution | 0.5 μm | ||
| Accuracy | ± 5.0 μm | ||
| XY stage drive | Closed-loop high precision servo motor PID control | ||
| Speed | Variable Speed XY chuck stage control | ||
| Max. movement speed | 120 mm / sec. | ||
| Chuck Z Stage (Programmable) | |||
| Travel range | 12.5 mm (0.5 in) | ||
| Resolution | 0.25 μm | ||
| Accuracy | ± 2.0 μm | ||
| Repeatability | ± 1.0 μm | ||
| Z stage drive | Closed-loop micro stepper motor | ||
| Speed | Variable Mode and Speed selection | ||
| Max. movement speed | 15 mm / sec. | ||
| Chuck Theta Stage (Programmable) | |||
| Travel range | ± 10° (total range = 20°) | ||
| Resolution | 0.000035° | ||
| Accuracy | < 1.0 μm (measured at the edge of the 300 mm chuck) | ||
| Repeatability | < 1.5 μm | ||
| Theta stage drive | High resolution stepper motor, rotary encoder feedback system | ||
| Roll Out / Loading Stage | |||
| Lock / Un-Lock | Software indicates when in Un-Lock Position | ||
| Wafer Presentation | 95% (see image pg. 1) | ||
| Return repeatability | < 1μm | ||
| Motorized Microscope Stage (linear) | |||
| Movement range | 50mm X 50mm (2”x2”) | ||
| Resolution | 0.02µm (20 Nano meters) | ||
| Scope lift | 101 mm (4”) Vertical Pneumatic (Motorized- optional) | ||
| Scope lift motorized (optional) | 50mm motorized + 50 mm pneumatic / combination = 101mm (4”) |
Probe Platen
| Specifications | |
|---|---|
| Material | Nickel Plated Steel (Al optional) |
| Dimension | L = 783mm x W = 840mm x H = 12.7mm (See drawing) |
| Chuck to Thermal Shield Separation | Min. 2 mm (Variable Separation with Fine Platen Adjust) |
| Max. No of Micro Positioners | 8x DC or 4x DC + 2x RF or 2x DC + 4x RF or 4x DC + 4x RF |
| Quick Platen Lift Control (CVL) | Continuous Variable Lift (0 to 3.175 mm) |
| Contact Repeatability | < 1 µm (0.04 mils) by Manual Control |
| RF MicroPositioner mounting | Magnetic or Bolt Down |
| DC MicroPositioner mounting | Magnetic or Vacuum |
| Thermal Isolation (Optional) | Platen Temp = +15 °C to +40°C /chuck @ -60 °C to +300°C |
Sample Probe Configured with 4 RF Probes
Universal Platen Designed for Multiple Probe Configurations
Sample Probe Configured with 4 RF + 2 DC Probes
Sample Probe Configured with 8 DC Probes
Sample Probe Configured with 2 RF + 2 COAX Probes
- ONE PLATEN x 4 BENFITS
Signatone Multi Benefit Ergonomically Correct Platen Adjust and Features:
- “Quick Lift” with CVL for easy probe to pad separation and alignment
- “Fine Adjust” for Probe card and variable Chucks and DUT thickness setup
- “Position Lock” allows for secure “lock” of user defined platen height setup
- “Thermal Isolation” maintains a safe temperature of probes and platen surface while chuck is at extreme temperatures (optional)
Signatone’s Local Enclosure is a high performance environmental chamber that provides an excellent EMI shielded and light-tight environment for low noise and low capacitance measurements.
Local Enclosure accommodates 4-port RF or 8-ports DC/Kelvin and connector panel or a combination of RF/DC.
The Signatone “Top Hat” provides for easy reconfiguration of Micro positioners, cables, connectors and additional customer defined fixtures allowing multiple setups while maintaining ease of use
Platen “Fine Adjust” and “Position Lock”
Platen “Quick Lift”
- Local Enclosure
| Local Enclosure Electrical Specifications | |
|---|---|
| EMI shielding | > 30 dB (typical) @ 1 kHz to 1 MHz |
| Light attenuation | ≥ 130 dB |
| Spectral noise floor | ≤ -180 dBVrms/rtHz (≤ 1 MHz |
| System AC noise | ≤ 5 mVp-p (≤ 1 GHz) |
Dc Probe –Selection Guide
| Coax Probe (C) | Triax Probe (T) | Kelvin Probe (K) | |
|---|---|---|---|
| Max voltage | 500 V | 500 V | 500 V |
| Temperature range | -60 °C to 300 °C | -60 °C to 300 °C | -60 °C to 300 °C |
| Leakage current | < 50fA | < 20fA | < 20fA |
| Connectivity | BNC | Standard Triax | SSMC |
| Connectivity type | Single Coaxial | Single low noise Triaxial | Force/Sense Coax |
| Characteristics impedance | 50 Ohms | 50 Ohms | 50 Ohms |
| Residual capacitance | < 80fF | < 80fF | < 80fF |
| Probe holder material | Brass | Brass | Brass |
| Probe tips material | Tungsten | Tungsten | Tungsten |
| Probe tips sizes | 0.5 µm – 25 µm | 0.5 µm – 25 µm | 0.5 µm – 25 µm |
| Minimum pad size | 25 µm x 25 µm | 25 µm x 25 µm | 25 µm x 25 µm |
Coax Probe
Triax Probe
Coax Kelvin Probe
- High Voltage/High Current PROBE –SELECTION GUIDE
| High Voltage Probes | High Current Probe | |||
|---|---|---|---|---|
| Model | HVP-CX-3 | HVP-TX-3 | HVP-CX-10 | HCP 100 |
| Max Voltage | 3 kV | 3 kV | 10 kV | 500 V |
| Max Current | 1 A DC/30 A Pulsed | 120 mA DC | 20 mA DC | 10 A DC/100 A Pulsed |
| Temperature Range | -60˚C to 300˚C | -60˚C to 300˚C | -60˚C to 300˚C | -60˚C to 300˚C |
| Leakage Current | < 200 pA @ 3 kV, < 5 pA @ 10 V | < 1 pA @ 3 kV, < 100 fA @ 10 V | < 100 pA @ 10 kV | N/A |
| Connector Type | SHV | HV Triax | UHV Coax | HV Banana |
| Replaceable Tip | Yes | Yes | Yes | Yes |
| Probe Material | W | W | W | BeCu or W |
Hvp-Cx-3
Hvp-Tx-3
Hvp-Cx-10
Hcp-100
*All leakage tests conducted in an enclosed environment with Keithley 4200, or equivalent, in sampling mode with 10 PLC, auto-ranging. 0.25s interval
Rf Probe –Selection Guide
| Cable Interface | |||||
|---|---|---|---|---|---|
| SP-40A | SP-50A | SP-67A | SP-110H | SP-145 | |
| Frequency | DC-40GHz | DC-50GHz | DC-67GHz | DC-110GHz | DC-145GHz |
| Connector | 2.92mm | 2.4mm | 1.85mm | 1.0mm | 0.8mm |
| Tip Configuration | GS/SG/GSG | GS/SG/GSG | GS/SG/GSG | GS/SG/GSG | GSG |
| Pitch Range | 50µ - 2540µ | 50µ - 1250µ | 50µ - 1250µ | 50µ - 1250µ | 50µ - 200µ |
| Insertion Loss | <.8db | <1.0db | <1.1db | <1.5db | <1.75db |
| Return Loss | > 18db | >18db | >14db | >15db | >15db |
| Calibration Substrates | ||||
|---|---|---|---|---|
| GSG | SP-CS-5 | SP-CS-9 | SP-CS-10 | SP-CS-18 |
| Pad Size | 50µ X 50µ | 100µ X 100µ | 150µ X 150µ | 300µ X 300µ |
| 100µ X 100µ | ||||
| 150µ X 150µ | ||||
| Pitch Range | 75µ - 250µ | 250µ - 600µ | 600µ - 1250µ | 1250µ - 2540µ |
| GS/SG | SP-CS-8 | SP-CS-14 | SP-CS-11 | SP-CS-17 |
| Pad Size | 50µ X 50µ | 100µ X 100µ | 150µ X 150µ | 300µ X 300µ |
| 100µ X 100µ | ||||
| 150µ X 150µ | ||||
| Pitch Range | 50µ - 200µ | 200µ - 400µ | 400µ - 1250µ | 750µ - 2540µ |
| GSG > 110GHz | SP-CS-15 | |||
| Pad Size | 25µ X 25µ | |||
| Pitch Range | 40µ - 150µ (SOLT) | |||
| 30µ - 150µ (LRM) |
| RF Cables | ||||
|---|---|---|---|---|
| RFC-40 | RFC-50 | RFC-67 | RFC-110 | |
| Frequency Range | DC - 40GHz | DC - 50GHz | DC - 67GHz | DC - 110GHz |
| Length | 4 Ft. | 4 Ft. | 3 Ft. | * |
| Connectors | 2.92 M – 2.92 F | 2.4 M – 2.4 F | 1.85 M - 1.85 F | 1.0 M - 1.0 F |
| * Contact Factory |
System Controls
The S1080 thermal chuck controller features touch screen commands, triple safety circuits, and 0.1° resolution.
ProbeMaster software features thermal control from the probe station.
Hardware accessories including keyboards and mouse can be easily integrated into the table’s instrumentation rack providing greater ease of use, ergonomics, and minimizing the overall system dimensions.
System and thermal controllers may also be integrated.
Industry proven precision Joy Stick/ thumbwheel combination, intuitive selector panel for DUT, Microscope, and 1-4 Computer Aided Probes (CAP).
LED indicator for active device, Multi-speed thumbwheels offer sub-micron positioning.
System Software
Signatone’s powerful navigation software ProbeMaster drives all Signatone semiautomatic probing systems.
ProbeMaster simplifies navigation to a test site by using arrow keys, wafer graph or point and shoot on the live image. The optional vision control module includes auto align, auto start, probe exact, and sure touch features.
Supports many popular interface protocols * see supported software platforms
Go to HOME Location
Wafer “Load / Un-Load”
Move or Step
Direction Keys
Device Selector
Indicates Wafer, Scope, Probe 1-4
Joystick Status
Sw Abort
Wafer Map
Programmed Points, Reports X-Y Position - Row/Colum.
Click and Move to Die Location, Color Map..
Program Points Program Sub-Sites
On-Screen Live Image Allows Image Capture and “Point –Shoot” navigation of Selected Device
Thermal Chuck
Control Software
0.1° resolution /
RS-232 interface
| Standard Wafer Chuck | |
|---|---|
| Connectivity | Coax BNC (m) |
| Diameter | 308 mm |
| Material | Nickel Plated Brass (gold optional) |
| Chuck surface | Zone selector knob with Peppered vacuum patterns |
| Vacuum hole pattern sections(diameter) | 22mm, 50mm, 91mm, 135mm, 168mm, 265mm |
| Vacuum actuation | Selector Knob allows individual activation of vacuum zones |
| Supported DUT sizes | 25mm, 75mm, 100mm, 150mm, 200mm, 300mm |
| Surface planarity | ±6.5µ |
| Rigidity | <3µ / 10N at edge of the chuck |
| Electrical Specification (Coax) | |
| Operation voltage | Designed for operation at -200V to + 200VDC |
| Maximum voltage between chuck top | 500 V DC |
| and GND | |
| Isolation | > 150 GΩ |
| Wafer Chuck (Triaxial) | |
| Connectivity | Triax (m) |
| Diameter | 308 mm |
| Material | Gold Plated Brass |
| Chuck surface | Independent Vacuum zones with vacuum rings |
| Vacuum hole pattern sections(diameter) | 0mm, 65mm, 112mm, 162mm, 265mm |
| Vacuum actuation | Multi-Zone Adjustable Control |
| Supported DUT sizes | 3mm, 75mm, 125mm, 200mm, 300mm |
| Surface planarity | ± 5 µm |
| Rigidity | <3µ / 10N near at edge of the chuck |
| Electrical Specification (Triax) | |
| Chuck isolation | Measured @ 10V DC |
| Force to guard | > 2 TΩ |
| Guard to shield | > 7 TΩ |
| Force to shield | > 15 TΩ |
Non-Thermal Chucks
| Auxiliary Chuck | |
|---|---|
| Quantity | 2 AUX chucks (2nd & 3rd aux chuck optional) |
| Position | Independently isolated (located on back left and right ) |
| Substrate Size (L x W) | Max 25mm x 25mm (1”x 1”) |
| Material | Ceramic, Ultem, or NI plated brass |
| Surface Planarity | ≤± 5 µm |
| Vacuum Control | Controlled independently, separate from wafer chucks |
| Typical Specifications of Signatone Thermal Technology | |||
|---|---|---|---|
| Nominal Description | 300mm Standard Hot | 300mm Hot/Cold Triax | 300mm Hot/Cold 3kV Triax |
| Temperature Range | +25 °C to +300 °C | -55 °C to +200 °C | -55 °C to +200 °C |
| Connectivity | Coax (m) | Triax (m) | SHV Triax (m) |
| Temperature control method | Liquid Cooled / Resistance heater | Liquid Cooled / Resistance heater | Liquid Cooled / Resistance heater |
| Coolant | Water | HFE | HFE |
| Smallest temperature selection step | 0.1 °C | 0.1 °C | 0.1 °C |
| Chuck temperature display resolution | 0.01 °C | 0.01 °C | 0.01 °C |
| External touchscreen display operation | Yes | Yes | Yes |
| Temperature stability | ±0.1 °C | ±0.1 °C | ±0.1 °C |
| Temperature accuracy | ±0.5 °C | ±0.5 °C | ±0.5 °C |
| Control method | Low noise DC/PID | Low noise DC/PID | Low noise DC/PID |
| Interfaces | RS232C | RS232C | RS232C |
| Optional Interfaces | GP-IB | GP-IB | GP-IB |
| Chuck surface plating | Nickel | Gold | Gold |
| Temperature sensor | RTD | RTD | RTD |
| Temperature uniformity | ±0.5 °C at ≤ 200 °C ±1.5 °C at > 200 °C | ±0.5 °C at ≤ 100 °C ±2.5 °C at 200 °C | ±0.5 °C at ≤ 100 °C ±3.5 °C at 200 °C |
| Surface flatness | < ±12 µm | < ±12 µm | < ±15µm |
| Electrical isolation - Coax BNC (m) | 150nA | > 5TΩ | > 5TΩ |
| Heating Rates | 25°C to 300°C < 20 min | 25°C to 200°C < 22 min | 25°C to 200°C < 28 min |
| Cooling Rates | 300°C to 25°C < 16min | 25 to -50°C < 45min | 25 to -50°C < 50min |
| Leakage @ 10 V Kelvin Triax (m) | N/A | <100fA | <400fA |
| Residual Capacitance | <1pF | <1pF | |
| Maximum voltage between chuck top and GND | 500V | 500V | 3kV |
| 3 Safety Circuits | Yes | Yes | Yes |
| Vacuum Pattern | Rings | Pin hole | Pin hole |
| Vacuum Zone (DUT Size) | 50, 100, 150, 200,300 mm | 2, 50, 100, 150, 200,300 mm | 2, 50, 100, 150, 200, 300mm |
| System Controller / Dimensions /Weight / Power Consumption | ||||
|---|---|---|---|---|
| System Model | W x D x H (mm) | Weight (kg) | Weight (Lbs.) | Power cons. (VA) |
| S-1080 | 432 x 483 x 267 | 20.4 | 45 | 2000 |
| TC-II | 355 x 711 x 610 | 50.8 | 112 | 1500 |
| 2XRC-89HL | 559 x 610 x 915 | 135 | 297 | 3700 |
Ers Ultra Low Noise Thermal Chucks
| Specifications of ERS Technology ULN 300mm Chucks (+300°C available) | |||
| Temperature Range | 25 °C to 200 °C | -40 °C to 200 °C | -60 °C to 200 °C |
| Connectivity | Kelvin Triax (f) | Kelvin Triax (f) | Kelvin Triax (f) |
| Temperature control method | Cooling air / Resistance heater | Cooling air / Resistance heater | Cooling air / Resistance heater |
| Coolant | Air (user supplied) | Air (user supplied) | Air (user supplied) |
| Smallest temperature selection step | 0.1 °C | 0.1 °C | 0.1 °C |
| Chuck temperature display resolution | 0.01 °C | 0.01 °C | 0.01 °C |
| External touchscreen display (optional) | Yes | Yes | Yes |
| Temperature stability | ±0.08 °C | ±0.08 °C | ±0.08 °C |
| Temperature accuracy | ±0.1 °C | ±0.1 °C | ±0.1 °C |
| Control method | Low noise DC/PID | Low noise DC/PID | Low noise DC/PID |
| Interfaces | RS232C | RS232C | RS232C |
| Chuck surface plating | Nickel plated with pinhole surface | Nickel plated with pinhole surface | Nickel plated with pinhole surface |
| Temperature sensor | Pt100 1/3DIN 4-line wired | Pt100 1/3DIN 4-line wired | Pt100 1/3DIN 4-line wired |
| Temperature uniformity | < ±0.5 °C at ≤ 200 °C | < ±0.5 °C at ≤ 200 °C | < ±0.5 °C at ≤ 200 °C |
| Surface flatness and base parallelism | < ±10 µm | < ±10 µm | < ±10 µm |
| Electrical isolation-Coax BNC (f) (ULN = Triax connection only) | N/A | N/A | N/A |
| Heating Rates | |||
| 25°C | 25°C to 150 °C < 15 min | -40 to 25 °C < 8 min | -60 to 25 °C < 12 min |
| 200 °C | 25°C to 200 °C < 15 min | 25C to 200 °C < 15min | 25C to 200 °C < 15min |
| Cooling Rates* | |||
| 200°C | 200 to 25 °C < 30 min | 200 to 25 °C < 30 min | 200 to 25 °C < 30 min |
| 25 °C | N/A | 25 to -40 °C < 30 min | 25 to -60 °C < 45 min |
| Leakage (*Ultra-low Noise configuration) | <15 fA/V at 25 °C <30 fA/V at 200 °C N/A | <15 fA/V at 25 °C <30 fA/V at 200 °C <30 fA/V at -40 °C | <15 fA/V at 25 °C <30 fA/V at 200 °C <30fA/V at -60 °C |
| Capacitance | N/A | N/A | N/A |
| Maximum voltage between chuck top and GND | 500 V DC | 500 V DC | 500 V DC |
*All data are relevant for chucks in ECO mode/ +30% cooling rates for ULN and HV Versions
| System Controller / Chiller Dimensions and Power / Air Consumption | ||||
|---|---|---|---|---|
| System type | W x D x H (mm) | Weight (kg) | Power cons. (VA) | max. Air flow (l/min) |
| 25 to 200 °C | 300 x 360 x 135 | 12 | 1300 | 220 |
| -40 to 200 °C | 420 x 500 x 1020 | 140 | 2400 | 350 |
| -60 to 200 °C | 420 x 500 x 1020 | 140 | 2400 | 350 |
*All data are relevant for chucks in ECO mode
| Dimensions (L x D x H) | 1093x 1085 x 1700 mm (43 x 42.7 x 66.9 In ) |
|---|---|
| Weight | 660 kg (1455 lbs.) |
WL-350-LE / Vibration Isolation Table /Monitor and Keyboard Mount
* Can very dependent on monitor, keyboard (roll out drawer) position and Microscope selection
System Dimensions Including Table
Warranty
- Standard Warranty 12 months *
- For Extended Warranty and Service Contracts : Contact Signatone Corp. for more information
* See Signatone Corporate Terms and Conditions of Sale for further details.
- North America: Sales.NA@signatone.com
- Europe: Sales.Europe@signatone.com
- Asia: Sales.Asia@signatone.com
Request a quote
Configure this system with our engineers — factory‑direct from Gilroy, California.