CHECKMATE 300MM SEMI-AUTOMATIC PROBE STATION

Part Number

CM-350

Title

CHECKMATE 300MM SEMI-AUTOMATIC PROBE STATION

Applications

Automated Probing
Probe Stations
Thermal Characterization

Description

Documents

Technical Specifications

WAFER SAMPLE SIZE

25MM 75MM 100MM 150MM 200MM 300mm

SAMPLE HOLD DOWN

INDEPENDENT CONTROLED VACUUM-ZONES

CHUCK-STAGE MOVEMENT

CLOSED-LOOP HIGH PRECISION SERVO MOTOR PID CONTROL

XY TRAVEL OF THE CHUCK

205MM X 205MM 12\” X 12\”

CHUCK MATERIAL

NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)

RESOLUTION STANDARD

0.5 μm

ACCURACY

+- 2.0 μm

CHUCK PLANARITY

LESS-THAN 10 MICRONS

CHUCK PLANARITY ADJUSTMENT

YES

CHUCK Z MOTION

PROGRAMABLE

CHUCK Z TRAVEL

12.5 mm (0.5 in)

CHUCK Z RESOLUTION

0.25 μm

CHUCK Z ACCURACY

± 2.0 μm

CHUCK Z REPEATABILITY

± 1.0 μm

CHUCK Z STAGE DRIVE

CLOSED-LOOP MICRO STEPPER MOTOR

CHUCK THETA MOTION

PROGRAMABLE

THETA SETTING RANGE

± 7.5° (15°)

THETA RESOLUTION

0.000035°

THETA ACCURACY

< 1.0 ΜM (MEASURED AT THE EDGE OF THE 300 MM CHUCK)

THETA REPEATABILITY

< 1.5 μm

THETA STAGE DRIVE

HIGH RESOLUTION STEPPER MOTOR, ROTARY ENCODER FEEDBACK SYSTEM

CHUCK ROLL OUT STAGE

YES PRESENTATION 285MM

PLATEN MATERIAL

STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER

PLATEN Z ADJUSTMENT

38MM WITH LOCK

CONTACT NON CONTACT HANDLE OF THE PLATEN

10MM

PLATEN CONTACT REPEATABILITY

+-1 MICRON

OPTICAL STAGE DRIVE

MANUAL-COARSE-FINE KNOB

OPTICAL BRIDGE XY TRAVEL

50MM X 50MM

OPTICAL BRIDGE Z TRAVEL

101 MM PNEUMATIC LIFT

CALIBRATION CHUCK

OPTIONAL

THERMAL CAPABILITY

YES (AMBIENT to +200°C)

OPTION

PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA

Accessories For Test Stations

Resistivity Test Systems

Probe Stations

Probe Tips & Holders

Micropositioners

Resistivity Testing

RF - Microwave Test Solutions

DC- CV/IV Analytical Probing

High Power Characterization