CHECKMATE HIGH STABILITY MANUAL ANALYTICAL PROBE STATION

Part Number

CM-170

Title

CHECKMATE HIGH STABILITY MANUAL ANALYTICAL PROBE STATION

Applications

CV/IV Measurements & Failure Analysis
Manual Analytical Probing
Probe Stations
Low Current Analysis

Description

Documents

Technical Specifications

WAFER SAMPLE SIZE

25MM 75MM 100MM 150MM 200MM

SAMPLE HOLD DOWN

INDEPENDENT CONTROLED VACUUM-ZONES

CHUCK-STAGE MOVEMENT

MANUAL GEAR-DRIVE STAGE

XY TRAVEL OF THE CHUCK

203MM X 203MM 8\” X 8\”

CHUCK MATERIAL

NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)

RESOLUTION STANDARD

75-MICRON PER DEGREE OF KNOB REVOLUTION

RESOLUTION FINE

1-MICRON AT 250-MICRONS OF KNOB REVOLUTION

CHUCK PLANARITY

LESS-THAN 10 MICRONS

CHUCK PLANARITY ADJUSTMENT

YES

THETA SETTING RANGE

360 DEGREES

THETA ROTATION LOCK

OPTIONAL

PLATEN MATERIAL

STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER

PLATEN Z ADJUSTMENT

38MM WITH LOCK

PLATEN CONTACT SEPERATE

10MM

PLATEN CONTACT REPEATABILITY

+-1 MICRON

OPTICAL STAGE DRIVE

MANUAL-COARSE-FINE KNOB

OPTICAL BRIDGE XY TRAVEL

50MM X 50MM

OPTICAL BRIDGE Z TRAVEL

101 MM PNEUMATIC LIFT

CHUCK ROLL OUT STAGE

NOT STANDARD – AVAILBLE ON UPGRADED SYSTEM

LOCAL ENCLOSURE

NO (AVAILBLE ON UPGRADED SYSTEM)

OPTION

PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA

Accessories For Test Stations

Resistivity Test Systems

Probe Stations

Probe Tips & Holders

Micropositioners

Resistivity Testing

RF - Microwave Test Solutions

DC- CV/IV Analytical Probing

High Power Characterization