300MM MANUAL RF-DC PROBE SYSTEM WITH LOCAL ENCLOSURE

Part Number

WL-310-LE

Title

300MM MANUAL RF-DC PROBE SYSTEM WITH LOCAL ENCLOSURE

Applications

CV/IV Measurements & Failure Analysis

Frequency Extenders and Tuners

HF & RF Microwave Probing

Millimeter Wave Probing

Probe Stations

Thermal Characterization

Description

WL-310-LE 300MM MANUAL PROBE STATION FOR RELIABLE,-ACCURATE RF/DC/CV,AND HIGH-POWER THERMAL TEST MEASUREMENTS

Documents

Technical Specifications

WAFER SAMPLE SIZE

25MM 75MM 100MM 150MM 200MM

SAMPLE HOLD DOWN

INDEPENDENT CONTROLLED VACUUM-ZONES

CHUCK-STAGE MOVEMENT

ENCODED DC STEPPER MOTOR – CARRIAGE AND RAILS

XY TRAVEL OF THE CHUCK

305MM X 305MM 12\” X 12\”

CHUCK MATERIAL

NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)

RESOLUTION STANDARD

1µm (4 X 10-5 mils) @ 2048µm/rev

RESOLUTION FINE

0.1 µm (3.94 x 10-7 mils) @ 204.8µm/rev

CHUCK PLANARITY

LESS-THAN 10 MICRONS

CHUCK PLANARITY ADJUSTMENT

YES

CHUCK Z TRAVEL

254µm (.01 mils)PRECISION PNEUMATIC LIFT

THETA SETTING RANGE

± 11° (22°)

THETA COURSE RESOLUTION

± 6° 1.5 x 10⁻4 GRADIANT

THETA FINE RESOLUTION

± 6°1.5 x 10⁻5 GRADIANT

THETA STAGE DRIVE

ENCODED DC STEPPER MOTOR

CHUCK ROLL OUT STAGE:

YES PRESENTATION 285MM-95%

PLATEN MATERIAL

STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER

PLATEN Z ADJUSTMENT

38MM WITH LOCK

PLATEN CONTACT SEPERATE

10MM

PLATEN CONTACT REPEATABILITY

+-1 MICRON

OPTICAL STAGE DRIVE

MANUAL-COARSE-FINE KNOB

OPTICAL BRIDGE XY TRAVEL

50MM X 50MM

OPTICAL BRIDGE Z TRAVEL

101 MM PNEUMATIC LIFT

CALIBRATION CHUCK

YES OPTIONAL 2ND CHUCK

LOCAL ENCLOSURE

YES (-65°C to +300°C)

OPTION

PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA

Accessories For Test Stations

Resistivity Test Systems

Probe Stations

Probe Tips & Holders

Micropositioners

Resistivity Testing

RF - Microwave Test Solutions

DC- CV/IV Analytical Probing

High Power Characterization