WL-170
WL-170 HIGH STABILITY MANUAL RF PROBE STATION
Part Number
WL-170
Title
WL-170 HIGH STABILITY MANUAL RF PROBE STATION
Applications
HF & RF Microwave Probing
CV/IV Measurements & Failure Analysis
Measurements
Millimeter Wave Probing
Description
WL-170 PROBE STATIONS FOR RELIABLE,-ACCURATE RF/DC/CV,AND HIGH-POWER TEST MEASUREMENTS
Documents
WL-170 DATA SHEETTechnical Specifications
WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM
SAMPLE HOLD DOWN
INDEPENDENT CONTROLLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
MANUAL GEAR-DRIVE STAGE
XY TRAVEL OF THE CHUCK
203MM X 203MM 8\" X 8\"
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
75-MICRON PER DEGREE OF KNOB REVOLUTION
RESOLUTION FINE
1-MICRON AT 250-MICRONS OF KNOB REVOLUTION
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
THETA SETTING RANGE
360 DEGREES
THETA ROTATION LOCK
OPTIONAL
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
PLATEN Z ADJUSTMENT
38MM WITH LOCK
PLATEN CONTACT ADJUST
10MM
PLATEN CONTACT REPEATABILITY
+-1 MICRON
OPTICAL STAGE DRIVE
MANUAL-COARSE-FINE KNOB
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z TRAVEL
101 MM PNEUMATIC LIFT
CALIBRATION CHUCK
YES OPTIONAL 2ND CHUCK
CHUCK ROLL OUT STAGE
NOT STANDARD
LOCAL ENCLOSURE
NOT STANDARD
OPTION
PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA
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