WL-170-THZ STABLE MANUAL RF-mmW PROBE STATION
WL-170-THZ
Part Number
WL-170-THZ
Title
WL-170-THZ STABLE MANUAL RF-mmW PROBE STATION
Applications
HF & RF Microwave Probing
CV/IV Measurements & Failure Analysis
DC To THz Probe Head Selection
Frequency Extenders and Tuners
Millimeter Wave Probing
Description
WL-170-THZ PROBE STATIONS DESIGNED FOR RELIABLE AND ACCURATE TEST OF mmW, THz, AND INPEDANCE TUNER APPLICATIONS
Technical Specifications
WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM
SAMPLE HOLD DOWN
INDEPENDENT CONTROLLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
MANUAL GEAR-DRIVE STAGE
XY TRAVEL OF THE CHUCK
203MM X 203MM 8\" X 8\"
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
75-MICRON PER DEGREE OF KNOB REVOLUTION
RESOLUTION FINE
1-MICRON AT 250-MICRONS OF KNOB REVOLUTION
CHUCK POSITION
CHUCK ABOVE THE PLATEN
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
THETA SETTING RANGE
360 DEGREES
THETA ROTATION LOCK
OPTIONAL
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
PLATEN Z ADJUSTMENT
38MM WITH LOCK
PLATEN CONTACT SEPERATE
10MM
PLATEN CONTACT REPEATABILITY
+-1 MICRON
PLATEN SIZE
OVER-SIZED FOR USE WITH LARGE AREA POSITIONERS
OPTICAL STAGE DRIVE
MANUAL-COARSE-FINE KNOB
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z TRAVEL
101 MM PNEUMATIC LIFT
CALIBRATION CHUCK
YES OPTIONAL 2ND CHUCK
CHUCK ROLL OUT STAGE
NOT STANDARD-AVAILABLE ON UPGRADED SYSTEM
LOCAL ENCLOSURE
NOT STANDARD - AVAILABLE ON UPGRADED SYSTEM
OPTION
DARK-BOX THERMAL-CHUCK CAMERA
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