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    WL-210-LE
    WL-210-LE MANUAL PROBE SYSTEM WITH LOCAL ENCLOSURE
    DescriptionDocumentsTechnical SpecificationsRelated Products
    WL-210-LE
    Part Number
    WL-210-LE
    Title
    WL-210-LE MANUAL PROBE SYSTEM WITH LOCAL ENCLOSURE
    Applications
    HF & RF Microwave Probing
    Frequency Extenders and Tuners
    Manual Analytical Probing
    Millimeter Wave Probing
    Measurements
    MEMS Probing
    Thermal Characterization
    Description

    WL-210-LE PROBE STATIONS FOR RELIABLE,-ACCURATE RF/DC/CV,AND HIGH-POWER THERMAL TEST MEASUREMENTS

    Technical Specifications
    WAFER SAMPLE SIZE
    25MM 75MM 100MM 150MM 200MM
    SAMPLE HOLD DOWN
    INDEPENDENT CONTROLLED VACUUM-ZONES
    CHUCK-STAGE MOVEMENT
    ENCODED DC STEPPER MOTOR – CARRIAGE AND RAILS
    XY TRAVEL OF THE CHUCK
    203MM X 203MM 8\" X 8\"
    CHUCK MATERIAL
    NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
    RESOLUTION STANDARD
    1µm (4 X 10-5 mils) @ 2048µm/rev
    RESOLUTION FINE
    0.1 µm (3.94 x 10-7 mils) @ 204.8µm/rev
    CHUCK PLANARITY
    LESS-THAN 10 MICRONS
    CHUCK PLANARITY ADJUSTMENT
    YES
    CHUCK Z TRAVEL
    254µm (.01 mils)PRECISSION PNEUMATIC LIFT
    THETA SETTING RANGE
    ± 11° (22°)
    THETA COURSE RESOLUTION
    ± 6° 1.5 x 10⁻4 GRADIANT
    THETA FINE RESOLUTION
    ± 6°1.5 x 10⁻5 GRADIANT
    THETA STAGE DRIVE
    ENCODED DC STEPPER MOTOR
    CHUCK ROLL OUT STAGE:
    YES PRESENTATION 190MM
    PLATEN MATERIAL
    STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
    PLATEN Z ADJUSTMENT
    38MM WITH LOCK
    PLATEN CONTACT SEPERATE
    10MM
    PLATEN CONTACT REPEATABILITY
    +-1 MICRON
    OPTICAL STAGE DRIVE
    MANUAL-COARSE-FINE KNOB
    OPTICAL BRIDGE XY TRAVEL
    50MM X 50MM
    OPTICAL BRIDGE Z TRAVEL
    101 MM PNEUMATIC LIFT
    CALIBRATION CHUCK
    YES OPTIONAL 2ND CHUCK
    LOCAL ENCLOSURE
    YES (-65°C to +300°C)
    OPTION
    PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA