300MM MANUAL RF-DC PROBE SYSTEM WITH LOCAL ENCLOSURE
WL-310-LE
Part Number
WL-310-LE
Title
300MM MANUAL RF-DC PROBE SYSTEM WITH LOCAL ENCLOSURE
Applications
CV/IV Measurements & Failure Analysis
Frequency Extenders and Tuners
HF & RF Microwave Probing
Millimeter Wave Probing
Probe Stations
Thermal Characterization
Description
WL-310-LE 300MM MANUAL PROBE STATION FOR RELIABLE,-ACCURATE RF/DC/CV,AND HIGH-POWER THERMAL TEST MEASUREMENTS
Technical Specifications
WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM
SAMPLE HOLD DOWN
INDEPENDENT CONTROLLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
ENCODED DC STEPPER MOTOR – CARRIAGE AND RAILS
XY TRAVEL OF THE CHUCK
305MM X 305MM 12\" X 12\"
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
1µm (4 X 10-5 mils) @ 2048µm/rev
RESOLUTION FINE
0.1 µm (3.94 x 10-7 mils) @ 204.8µm/rev
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
CHUCK Z TRAVEL
254µm (.01 mils)PRECISION PNEUMATIC LIFT
THETA SETTING RANGE
± 11° (22°)
THETA COURSE RESOLUTION
± 6° 1.5 x 10⁻4 GRADIANT
THETA FINE RESOLUTION
± 6°1.5 x 10⁻5 GRADIANT
THETA STAGE DRIVE
ENCODED DC STEPPER MOTOR
CHUCK ROLL OUT STAGE:
YES PRESENTATION 285MM-95%
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
PLATEN Z ADJUSTMENT
38MM WITH LOCK
PLATEN CONTACT SEPERATE
10MM
PLATEN CONTACT REPEATABILITY
+-1 MICRON
OPTICAL STAGE DRIVE
MANUAL-COARSE-FINE KNOB
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z TRAVEL
101 MM PNEUMATIC LIFT
CALIBRATION CHUCK
YES OPTIONAL 2ND CHUCK
LOCAL ENCLOSURE
YES (-65°C to +300°C)
OPTION
PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA
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