WL-350-LE
300MM SEMI-AUTOMATIC PROBE SYSTEM WITH LOCAL ENCLOSURE
Part Number
WL-350-LE
Title
300MM SEMI-AUTOMATIC PROBE SYSTEM WITH LOCAL ENCLOSURE
Applications
HF & RF Microwave Probing
Automated Probing
Measurements
Low Current Analysis
Millimeter Wave Probing
Thermal Characterization
Description
300mm SEMI-AUTOMATIC PROBE STATION FOR RELIABLE, ACCURATE RF/DC/CV,AND HIGH-POWER THERMAL TEST MEASUREMENTS
Documents
WL-350-LE DATA SHEETTechnical Specifications
WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM 300MM
SAMPLE HOLD DOWN
INDEPENDENT CONTROLLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
CLOSED-LOOP HIGH PRECISION SERVO MOTOR PID CONTROL
XY TRAVEL OF THE CHUCK
305MM X 305MM 12\" X 12\"
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
0.5 μm
ACCURACY
0.5 μm
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
CHUCK Z MOTION
PROGRAMABLE
CHUCK Z TRAVEL
12.5 mm (0.5 in)
CHUCK Z RESOLUTION
0.25 μm
CHUCK Z ACCURACY
± 2.0 μm
CHUCK Z REPEATABILITY
± 1.0 μm
CHUCK Z STAGE DRIVE
CLOSED-LOOP MICRO STEPPER MOTOR
CHUCK THETA MOTION
PROGRAMABLE
THETA SETTING RANGE
± 10° (20°)
THETA RESOLUTION
0.000035°
THETA ACCURACY
< 1.0 ΜM (MEASURED AT THE EDGE OF THE 300 MM CHUCK)
THETA REPEATABILITY
< 1.5 μm
THETA STAGE DRIVE
HIGH RESOLUTION STEPPER MOTOR, ROTARY ENCODER FEEDBACK SYSTEM
CHUCK ROLL OUT STAGE
YES PRESENTATION 285MM-95%
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
PLATEN Z ADJUSTMENT
38MM WITH LOCK
PLATEN CONTACT SEPERATE
10MM
PLATEN CONTACT REPEATABILITY
+-1 MICRON
OPTICAL STAGE DRIVE
MANUAL-COARSE-FINE KNOB
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z TRAVEL
101 MM PNEUMATIC LIFT
CALIBRATION CHUCK
YES OPTIONAL 2ND CHUCK
LOCAL ENCLOSURE
YES (-65°C to +300°C)
OPTION
PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA
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