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    WL-350-LE
    300MM SEMI-AUTOMATIC PROBE SYSTEM WITH LOCAL ENCLOSURE
    DescriptionDocumentsTechnical SpecificationsRelated Products
    WL-350-LE
    Part Number
    WL-350-LE
    Title
    300MM SEMI-AUTOMATIC PROBE SYSTEM WITH LOCAL ENCLOSURE
    Applications
    HF & RF Microwave Probing
    Automated Probing
    Measurements
    Low Current Analysis
    Millimeter Wave Probing
    Thermal Characterization
    Description

    300mm SEMI-AUTOMATIC PROBE STATION FOR RELIABLE, ACCURATE RF/DC/CV,AND HIGH-POWER THERMAL TEST MEASUREMENTS

    Technical Specifications
    WAFER SAMPLE SIZE
    25MM 75MM 100MM 150MM 200MM 300MM
    SAMPLE HOLD DOWN
    INDEPENDENT CONTROLLED VACUUM-ZONES
    CHUCK-STAGE MOVEMENT
    CLOSED-LOOP HIGH PRECISION SERVO MOTOR PID CONTROL
    XY TRAVEL OF THE CHUCK
    305MM X 305MM 12\" X 12\"
    CHUCK MATERIAL
    NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
    RESOLUTION STANDARD
    0.5 μm
    ACCURACY
    0.5 μm
    CHUCK PLANARITY
    LESS-THAN 10 MICRONS
    CHUCK PLANARITY ADJUSTMENT
    YES
    CHUCK Z MOTION
    PROGRAMABLE
    CHUCK Z TRAVEL
    12.5 mm (0.5 in)
    CHUCK Z RESOLUTION
    0.25 μm
    CHUCK Z ACCURACY
    ± 2.0 μm
    CHUCK Z REPEATABILITY
    ± 1.0 μm
    CHUCK Z STAGE DRIVE
    CLOSED-LOOP MICRO STEPPER MOTOR
    CHUCK THETA MOTION
    PROGRAMABLE
    THETA SETTING RANGE
    ± 10° (20°)
    THETA RESOLUTION
    0.000035°
    THETA ACCURACY
    < 1.0 ΜM (MEASURED AT THE EDGE OF THE 300 MM CHUCK)
    THETA REPEATABILITY
    < 1.5 μm
    THETA STAGE DRIVE
    HIGH RESOLUTION STEPPER MOTOR, ROTARY ENCODER FEEDBACK SYSTEM
    CHUCK ROLL OUT STAGE
    YES PRESENTATION 285MM-95%
    PLATEN MATERIAL
    STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
    PLATEN Z ADJUSTMENT
    38MM WITH LOCK
    PLATEN CONTACT SEPERATE
    10MM
    PLATEN CONTACT REPEATABILITY
    +-1 MICRON
    OPTICAL STAGE DRIVE
    MANUAL-COARSE-FINE KNOB
    OPTICAL BRIDGE XY TRAVEL
    50MM X 50MM
    OPTICAL BRIDGE Z TRAVEL
    101 MM PNEUMATIC LIFT
    CALIBRATION CHUCK
    YES OPTIONAL 2ND CHUCK
    LOCAL ENCLOSURE
    YES (-65°C to +300°C)
    OPTION
    PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA