WL-1160
WL-1160 MULTI-PURPOSE MANUAL RF PROBE STATION
WAFER SAMPLE SIZE
25MM 75MM 100MM 150MM 200MM
SAMPLE HOLD DOWN
INDEPENDENTLY CONTROLLED VACUUM-ZONES
CHUCK-STAGE MOVEMENT
MANUAL GEAR-DRIVE STAGE
XY TRAVEL OF THE CHUCK
203MM X 203MM / 8" X 8"
CHUCK MATERIAL
NICKEL PLATED BRASS (GOLD PLATE OPTIONAL)
RESOLUTION STANDARD
75-MICRON PER DEGREE OF KNOB REVOLUTION
RESOLUTION FINE
1-MICRON AT 250-MICRONS OF KNOB REVOLUTION
CHUCK PLANARITY
LESS-THAN 10 MICRONS
CHUCK PLANARITY ADJUSTMENT
YES
THETA SETTING RANGE
360 DEGREES
THETA ROTATION LOCK
OPTIONAL
PLATEN MATERIAL
STEEL FOR VACUUM OR MAGNETIC MICROPOSITIONER
CONTACT NON CONTACT HANDLE OF THE PLATEN
10MM
PLATEN CONTACT REPEATABILITY
+-1 MICRON
OPTICAL STAGE DRIVE
MANUAL- PRECISION LEAD SCREW
OPTICAL BRIDGE XY TRAVEL
50MM X 50MM
OPTICAL BRIDGE Z ADJUST
100 MM MANUAL SET-UP
CALIBRATION CHUCK
YES WITH OPTIONAL 2ND CAL CHUCK
CHUCK ROLL OUT STAGE FOR EASY LOADING
NO
OPTION
PROBE-CARD-ADAPTER DARK-BOX THERMAL-CHUCK CAMERA AND MORE