Resistivity · Four-Point Probe

Resistivity Systems

Four-point probing since 1968 — manual benches to automated mapping.

Resistivity Systems — Four-point probing since 1968 — manual benches to automated mapping.

Overview

Signatone has offered inline four-point probing solutions since 1968. The Pro4 provides simple, reliable sheet and bulk resistivity measurement; the QuadPro2 adds automation, full-wafer mapping, and dual-configuration testing per ASTM F84-99; ΩPro handles general resistance testing. SP4 and HT4 four-point probe heads complete the system.

Specifications

Pro4

Inline four-point sheet & bulk resistivity — data sheet rev 1.8.

MeasurementManual four-point sheet & bulk resistivity
Sheet-R range10 µΩ – 100 MΩ per square (standard)
Instrument controlKeithley 2450 / 2600
Stands100 mm / 150 mm / 200 mm / 300 mm
ConfigurationsPro4-4 / Pro4-6 / Pro4-L / Pro4-B / Pro4-U
Probe headsSP4 / HT4 four-point heads
QuadPro2

Automated resistivity & full-wafer mapping — data sheet rev 1.7.

MeasurementAutomated V/I, sheet R, resistivity, thickness
Sample sizes10 – 300 mm
Test points5 – 14,000 · up to 50 measurements/min
Mapping2D / 3D contour
StandardDual-configuration per ASTM F84-99
CalibrationNIST-traceable

Specs from the Pro4 data sheet rev 1.8 and QuadPro2 data sheet rev 1.7.

Models & datasheets

Current-revision datasheets, straight from Signatone. No login.

ModelDescriptionDatasheetQuote
Pro4Inline four-point sheet and bulk resistivity test system.PDF ↓Quote →
QuadPro2Automated resistivity measurement system with full-wafer mapping.PDF ↓Quote →
ΩProResistance testing system.PDF ↓Quote →
SP4 / HT4 headsFour-point probe heads — selection guide for spacing, load, and tip material.PDF ↓Quote →

Spec your Resistivity Systems

Tell us your wafer size, test type, and frequency / temperature range. We'll come back with a configuration and a price.