Manual Probe Stations
S-1160 Manual Probe Station
The industry-standard 150–200 mm manual probe station.
Overview
The S-1160 is Signatone's workhorse manual probe station for reliable, accurate analytical testing of DC, CV-IV, and high-power applications on 150 mm to 200 mm wafers. Three variants — S-1160A, S-1160B, and S-1160S — differ by microscope mount, so you can pair the station with the optics your lab already trusts.
Specifications
| Parameter | Value |
|---|---|
| Chuck XY travel | 203 mm × 203 mm |
| Fine-travel resolution | < 1 µm |
| Planarity | < 10 µm |
| Micropositioner capacity | up to 10 |
| Quick platen lift | 9.375 mm |
| Wafer sizes | 150 – 200 mm |
Specs from the S-1160 data sheet v1.5 (06-2020).
Models & datasheets
Current-revision datasheets, straight from Signatone. No login.
| Model | Description | Datasheet | Quote |
|---|---|---|---|
| S-1160A | S-1160 with A-style microscope mount. | PDF ↓ | Quote → |
| S-1160B | S-1160 with B-style microscope mount. | PDF ↓ | Quote → |
| S-1160S | S-1160 with S-style microscope mount. | PDF ↓ | Quote → |
Gallery
Configurations and detail shots from current production. Click any photo to enlarge.
Pair with
Positioners
Micropositioners
From general-purpose 3-axis to large-area RF / mmW extender positioners.
Optics & Imaging
Microscopes
Probing-grade optics, from stereo zoom to advanced compound systems.
Thermal Systems
Thermal Chucks
Integrated thermal probing — chucks and the S-1080 controller, built in-house.
Accessories
Accessories
Dark boxes, probe card adapters, and specialty chucks.
Spec your S-1160 Manual Probe Station
Tell us your wafer size, test type, and frequency / temperature range. We'll come back with a configuration and a price.